Volatile asymmetric fluorinated (O^N)-chelated palladium complexes: From ligand sources to MOCVD application

N. S. Nikolaeva; N. V. Kuratieva; E. S. Vikulova; P. A. Stabnikov; N. B. Morozova

doi:10.1016/j.poly.2019.07.039

Volatile asymmetric fluorinated (O^N)-chelated palladium complexes: From ligand sources to MOCVD application

N. S. Nikolaeva, N. V. Kuratieva, E. S. Vikulova, P. A. Stabnikov, N. B. Morozova

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

Аннотация

The work deals with the volatile asymmetric palladium complexes of β-ketoiminate-type as a new direction to design the effective partially fluorinated (O^N)-chelated precursors for metal–organic chemical vapor deposition (MOCVD). To determine the effect of the substituent on the donor nitrogen atom, [Pd(CF₃COCHCN(R)CH₃)₂]₂ complexes with R = CH₃ (Mei-tfac) and N(CH₃)₂ (dmht) were synthesized and characterized by elemental analysis, IR and NMR spectroscopy. The molecular and crystal structures of the complexes as well as the initial ligand sources HMei-tfac and Hdmht were determined by single-crystal XRD. The obtained a new crystallographic and thermal (TG/DTA) information combined with the crystal lattice energy calculations allowed to reveal the features of the N-substituted fluorinated complexes in comparison with their non-fluorinated analogs. The possibility of using the proposed compounds as MOCVD precursors was experimentally confirmed.

Язык оригинала	английский
Страницы (с-по)	455-463
Число страниц	9
Журнал	Polyhedron
Том	171
DOI	https://doi.org/10.1016/j.poly.2019.07.039
Состояние	Опубликовано - 1 окт. 2019

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10.1016/j.poly.2019.07.039

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title = "Volatile asymmetric fluorinated (O^N)-chelated palladium complexes: From ligand sources to MOCVD application",

abstract = "The work deals with the volatile asymmetric palladium complexes of β-ketoiminate-type as a new direction to design the effective partially fluorinated (O^N)-chelated precursors for metal–organic chemical vapor deposition (MOCVD). To determine the effect of the substituent on the donor nitrogen atom, [Pd(CF3COCHCN(R)CH3)2]2 complexes with R = CH3 (Mei-tfac) and N(CH3)2 (dmht) were synthesized and characterized by elemental analysis, IR and NMR spectroscopy. The molecular and crystal structures of the complexes as well as the initial ligand sources HMei-tfac and Hdmht were determined by single-crystal XRD. The obtained a new crystallographic and thermal (TG/DTA) information combined with the crystal lattice energy calculations allowed to reveal the features of the N-substituted fluorinated complexes in comparison with their non-fluorinated analogs. The possibility of using the proposed compounds as MOCVD precursors was experimentally confirmed.",

keywords = "Beta-ketoiminates, MOCVD, Palladium volatile precursors, Single crystal X-ray diffraction analysis, Thermal properties",

author = "Nikolaeva, {N. S.} and Kuratieva, {N. V.} and Vikulova, {E. S.} and Stabnikov, {P. A.} and Morozova, {N. B.}",

note = "Publisher Copyright: {\textcopyright} 2019 Elsevier Ltd",

year = "2019",

month = oct,

day = "1",

doi = "10.1016/j.poly.2019.07.039",

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Volatile asymmetric fluorinated (O^N)-chelated palladium complexes : From ligand sources to MOCVD application. / Nikolaeva, N. S.; Kuratieva, N. V.; Vikulova, E. S. и др.

В: Polyhedron, Том 171, 01.10.2019, стр. 455-463.

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

TY - JOUR

T1 - Volatile asymmetric fluorinated (O^N)-chelated palladium complexes

T2 - From ligand sources to MOCVD application

AU - Nikolaeva, N. S.

AU - Kuratieva, N. V.

AU - Vikulova, E. S.

AU - Stabnikov, P. A.

AU - Morozova, N. B.

PY - 2019/10/1

Y1 - 2019/10/1

N2 - The work deals with the volatile asymmetric palladium complexes of β-ketoiminate-type as a new direction to design the effective partially fluorinated (O^N)-chelated precursors for metal–organic chemical vapor deposition (MOCVD). To determine the effect of the substituent on the donor nitrogen atom, [Pd(CF3COCHCN(R)CH3)2]2 complexes with R = CH3 (Mei-tfac) and N(CH3)2 (dmht) were synthesized and characterized by elemental analysis, IR and NMR spectroscopy. The molecular and crystal structures of the complexes as well as the initial ligand sources HMei-tfac and Hdmht were determined by single-crystal XRD. The obtained a new crystallographic and thermal (TG/DTA) information combined with the crystal lattice energy calculations allowed to reveal the features of the N-substituted fluorinated complexes in comparison with their non-fluorinated analogs. The possibility of using the proposed compounds as MOCVD precursors was experimentally confirmed.

AB - The work deals with the volatile asymmetric palladium complexes of β-ketoiminate-type as a new direction to design the effective partially fluorinated (O^N)-chelated precursors for metal–organic chemical vapor deposition (MOCVD). To determine the effect of the substituent on the donor nitrogen atom, [Pd(CF3COCHCN(R)CH3)2]2 complexes with R = CH3 (Mei-tfac) and N(CH3)2 (dmht) were synthesized and characterized by elemental analysis, IR and NMR spectroscopy. The molecular and crystal structures of the complexes as well as the initial ligand sources HMei-tfac and Hdmht were determined by single-crystal XRD. The obtained a new crystallographic and thermal (TG/DTA) information combined with the crystal lattice energy calculations allowed to reveal the features of the N-substituted fluorinated complexes in comparison with their non-fluorinated analogs. The possibility of using the proposed compounds as MOCVD precursors was experimentally confirmed.

KW - Beta-ketoiminates

KW - MOCVD

KW - Palladium volatile precursors

KW - Single crystal X-ray diffraction analysis

KW - Thermal properties

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