@inproceedings{28176593aaf04e319546380b75f0620a,
title = "Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography",
abstract = "It is brought an approach of creation and close-packing two-dimensional photonic crystals with given sizes of elements by the EBL. The main problems of formation these structures were considered.",
keywords = "lithography, Photonic crystal, proximity effect",
author = "Utkin, {Dmitry E.} and Nasimov, {Dmitry A.} and Latyshev, {Alexander V.}",
year = "2012",
doi = "10.1109/EDM.2012.6310185",
language = "English",
isbn = "9781467325202",
series = "International Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings",
pages = "47--50",
booktitle = "2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 - Proceedings",
note = "2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 ; Conference date: 02-07-2012 Through 06-07-2012",
}