Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition

Sergey V. Starinskiy; Alexander V. Bulgakov; Elizaveta Ya Gatapova; Yuri G. Shukhov; Veronica S. Sulyaeva; Nikolay I. Timoshenko; Alexey I. Safonov

doi:10.1088/1361-6463/aac641

Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition

Sergey V. Starinskiy, Alexander V. Bulgakov, Elizaveta Ya Gatapova, Yuri G. Shukhov, Veronica S. Sulyaeva, Nikolay I. Timoshenko, Alexey I. Safonov

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

8 Цитирования (Scopus)

Аннотация

We propose a novel approach for synthesizing silicon surfaces ensuring arbitrary apparent contact angle within the range from 0° to 170° for water. Superhydrophilicity of silicon substrates is achieved by nanosecond laser treatment and subsequent change in the contact angle is obtained by deposition of fluoropolymer films with different thicknesses by a hot wire chemical vapor deposition (HWCVD) method. The deposited film thickness needed to obtain superhydrophobicity was determined. The wettability properties of the produced fluoropolymer-silicon system are analyzed using the Wenzel and Cassie theories.

Язык оригинала	английский
Номер статьи	255307
Число страниц	7
Журнал	Journal Physics D: Applied Physics
Том	51
Номер выпуска	25
DOI	https://doi.org/10.1088/1361-6463/aac641
Состояние	Опубликовано - 27 июн. 2018

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10.1088/1361-6463/aac641

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title = "Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition",

abstract = "We propose a novel approach for synthesizing silicon surfaces ensuring arbitrary apparent contact angle within the range from 0° to 170° for water. Superhydrophilicity of silicon substrates is achieved by nanosecond laser treatment and subsequent change in the contact angle is obtained by deposition of fluoropolymer films with different thicknesses by a hot wire chemical vapor deposition (HWCVD) method. The deposited film thickness needed to obtain superhydrophobicity was determined. The wettability properties of the produced fluoropolymer-silicon system are analyzed using the Wenzel and Cassie theories.",

keywords = "fluoropolymer, HWCVD, laser treatment, superhydrophilic, superhydrophobic, DESIGN, WETTABILITY, BEHAVIOR, CONTACT ANGLES, SUBSTRATE, RESISTANCE, COATINGS, FABRICATION, EQUATION, SURFACES",

author = "Starinskiy, {Sergey V.} and Bulgakov, {Alexander V.} and Gatapova, {Elizaveta Ya} and Shukhov, {Yuri G.} and Sulyaeva, {Veronica S.} and Timoshenko, {Nikolay I.} and Safonov, {Alexey I.}",

note = "Publisher Copyright: {\textcopyright} 2018 IOP Publishing Ltd.",

year = "2018",

month = jun,

day = "27",

doi = "10.1088/1361-6463/aac641",

language = "English",

volume = "51",

journal = "Journal Physics D: Applied Physics",

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Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition. / Starinskiy, Sergey V.; Bulgakov, Alexander V.; Gatapova, Elizaveta Ya и др.

В: Journal Physics D: Applied Physics, Том 51, № 25, 255307, 27.06.2018.

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

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T1 - Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition

AU - Starinskiy, Sergey V.

AU - Bulgakov, Alexander V.

AU - Gatapova, Elizaveta Ya

AU - Shukhov, Yuri G.

AU - Sulyaeva, Veronica S.

AU - Timoshenko, Nikolay I.

AU - Safonov, Alexey I.

PY - 2018/6/27

Y1 - 2018/6/27

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AB - We propose a novel approach for synthesizing silicon surfaces ensuring arbitrary apparent contact angle within the range from 0° to 170° for water. Superhydrophilicity of silicon substrates is achieved by nanosecond laser treatment and subsequent change in the contact angle is obtained by deposition of fluoropolymer films with different thicknesses by a hot wire chemical vapor deposition (HWCVD) method. The deposited film thickness needed to obtain superhydrophobicity was determined. The wettability properties of the produced fluoropolymer-silicon system are analyzed using the Wenzel and Cassie theories.

KW - fluoropolymer

KW - HWCVD

KW - laser treatment

KW - superhydrophilic

KW - superhydrophobic

KW - DESIGN

KW - WETTABILITY

KW - BEHAVIOR

KW - CONTACT ANGLES

KW - SUBSTRATE

KW - RESISTANCE

KW - COATINGS

KW - FABRICATION

KW - EQUATION

KW - SURFACES

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