The effect of the substrate spatial orientation on the properties of amorphous carbon coatings deposited from pulse plasma flows

Sergey Chepkasov, Maksim Khomyakov, Alexander Zolkin, Evgeniy Maksimovskii, Dmitry Piliptsou

Результат исследования: Публикации в книгах, отчётах, сборниках, трудах конференцийстатья в сборнике материалов конференциинаучнаярецензирование

Аннотация

Tetrahedral amorphous carbon coatings (ta-C) have been deposited by pulsed vacuum arc method at different incidence angles of the carbon ions flow on the silicon substrate, determined from the axis of the flow direction and from normal to the substrate surface, and corresponded to 0°, 15°, 45° and 75°. The effect of the substrate orientation relative to the propagation direction of the pulsed carbon plasma flow on the structure, morphology, mechanical and optical properties of ta-C coatings has been studied. The study indicated a decrease in the number of nano - and macroparticles with an increase in the incidence angle of the flow. Also, a change in sp2 cluster size and their ordering with an increase in the incidence angle of the flow was found. The substrate tilting led to a decrease in the thickness, refractive index, nanohardness and Young's modulus of ta-C coatings. The optimal position of the substrate relative to the incident flow was found to be 15°. This angle corresponds to maximum values of hardness (28 GPa) and Young's modulus (227 GPa) of the coating.

Язык оригиналаанглийский
Название основной публикацииProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
ИздательInstitute of Electrical and Electronics Engineers Inc.
Страницы856-862
Число страниц7
ISBN (электронное издание)9781728126869
DOI
СостояниеОпубликовано - 14 сен 2020
Событие7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 - Virtual, Tomsk, Российская Федерация
Продолжительность: 14 сен 202026 сен 2020

Серия публикаций

НазваниеProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Конференция

Конференция7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
СтранаРоссийская Федерация
ГородVirtual, Tomsk
Период14.09.202026.09.2020

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