The atomic and electronic structure of Hf0.5Zr0.5O2 and Hf0.5Zr0.5O2: La films

Timofey Perevalov, Igor P. Prosvirin, Evgenii A. Suprun, Furqan Mehmood, Thomas Mikolajick, Uwe Schroeder, Vladimir A. Gritsenko

Результат исследования: Научные публикации в периодических изданияхстатьярецензирование

Аннотация

HfxZr1-xO2 and lanthanum-doped HfxZr1-xO2:La thin films are candidates for applications in ferroelectric random-access memory. Here, we explore the atomic and electronic structure of Hf0.5Zr0.5O2 and Hf0.5Zr0.5O2:La thin films grown by atomic layer deposition. Using X-ray photoelectron spectroscopy, it was found that the oxides under study have an almost identical electronic structure and a bandgap of about 5.4 eV. The Hf0.5Zr0.5O2:La film was shown to consist of the mixture of Hf0.5Zr0.5O2 and La2O3 phases. The bombardment with argon ions of the studied films leads to oxygen vacancy generation in the near-surface layer. The oxygen vacancy concentrations in the bombarded films were evaluated from the comparison of experimental valence band photoelectron spectra with the theoretical ones calculated using the density functional theory.

Язык оригиналаанглийский
Страницы (с-по)595-600
Число страниц6
ЖурналJournal of science-Advanced materials and devices
Том6
Номер выпуска4
DOI
СостояниеОпубликовано - дек 2021

Предметные области OECD FOS+WOS

  • 2.05.PM МАТЕРИАЛОВЕДЕНИЕ, МУЛЬТИДИСЦИПЛИНАРНОЕ
  • 2.05 ТЕХНОЛОГИЯ МАТЕРИАЛОВ

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