Study of TLIPSS formation on different metals and alloys and their selective etching

Alexandr V. Dostovalov; Victor P. Korolkov; Vadim S. Terentiev; Konstantin A. Okotrub; Fedor N. Dultsev; Anton Nemykin; Sergey A. Babin

doi:10.1117/12.2251341

Study of TLIPSS formation on different metals and alloys and their selective etching

Alexandr V. Dostovalov, Victor P. Korolkov, Vadim S. Terentiev, Konstantin A. Okotrub, Fedor N. Dultsev, Anton Nemykin, Sergey A. Babin

Результат исследования: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › рецензирование

Аннотация

Experimental investigation of thermochemical laser-induced periodic surface structures (TLIPSS) formation on metal films (Ti, Cr, Ni, NiCr) at different processing conditions is presented. The hypothesis that the TLIPSS formation depends significantly on parabolic rate constant for oxide thin film growth is discussed. Evidently, low value of this parameter for Ni is the reason of TLIPSS absence on Ni and NiCr film with low Cr content. The effect of simultaneous ablative (with period ≈λ) and thermochemical (with period ≈λ) LIPSS formation was observed. The formation of structures after TLIPSS selective etching was demonstrated.

Язык оригинала	английский
Название основной публикации	Laser-Based Micro- and Nanoprocessing XI
Редакторы	U Klotzbach, K Washio, R Kling
Издатель	SPIE
Число страниц	9
Том	10092
ISBN (электронное издание)	9781510606258
ISBN (печатное издание)	978-1-5106-0626-5
DOI	https://doi.org/10.1117/12.2251341
Состояние	Опубликовано - 1 янв 2017
Событие	Laser-Based Micro- and Nanoprocessing XI 2017 - San Francisco, Соединенные Штаты Америки Продолжительность: 31 янв 2017 → 2 фев 2017

Серия публикаций

Название	Proceedings of SPIE
Издатель	SPIE-INT SOC OPTICAL ENGINEERING
Том	10092
ISSN (печатное издание)	0277-786X

Конференция

Конференция	Laser-Based Micro- and Nanoprocessing XI 2017
Страна	Соединенные Штаты Америки
Город	San Francisco
Период	31.01.2017 → 02.02.2017

Доступ к документу

10.1117/12.2251341

Link to publication in Scopus

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Цитировать

Dostovalov, A. V., Korolkov, V. P., Terentiev, V. S., Okotrub, K. A., Dultsev, F. N., Nemykin, A., & Babin, S. A. (2017). Study of TLIPSS formation on different metals and alloys and their selective etching. В U. Klotzbach, K. Washio, & R. Kling (Ред.), Laser-Based Micro- and Nanoprocessing XI (Том 10092). [100921H] (Proceedings of SPIE; Том 10092). SPIE. https://doi.org/10.1117/12.2251341

Dostovalov, Alexandr V. ; Korolkov, Victor P. ; Terentiev, Vadim S. ; Okotrub, Konstantin A. ; Dultsev, Fedor N. ; Nemykin, Anton ; Babin, Sergey A. / Study of TLIPSS formation on different metals and alloys and their selective etching. Laser-Based Micro- and Nanoprocessing XI. редактор / U Klotzbach ; K Washio ; R Kling. Том 10092 SPIE, 2017. (Proceedings of SPIE).

@inproceedings{8febe108eaaf449a840e71eaf29761b7,

title = "Study of TLIPSS formation on different metals and alloys and their selective etching",

abstract = "Experimental investigation of thermochemical laser-induced periodic surface structures (TLIPSS) formation on metal films (Ti, Cr, Ni, NiCr) at different processing conditions is presented. The hypothesis that the TLIPSS formation depends significantly on parabolic rate constant for oxide thin film growth is discussed. Evidently, low value of this parameter for Ni is the reason of TLIPSS absence on Ni and NiCr film with low Cr content. The effect of simultaneous ablative (with period ≈λ) and thermochemical (with period ≈λ) LIPSS formation was observed. The formation of structures after TLIPSS selective etching was demonstrated.",

keywords = "femtosecond laser, LIPSS, thermochemical modification, thin metal films",

author = "Dostovalov, {Alexandr V.} and Korolkov, {Victor P.} and Terentiev, {Vadim S.} and Okotrub, {Konstantin A.} and Dultsev, {Fedor N.} and Anton Nemykin and Babin, {Sergey A.}",

year = "2017",

month = jan,

day = "1",

doi = "10.1117/12.2251341",

language = "English",

isbn = "978-1-5106-0626-5",

volume = "10092",

series = "Proceedings of SPIE",

publisher = "SPIE",

editor = "U Klotzbach and K Washio and R Kling",

booktitle = "Laser-Based Micro- and Nanoprocessing XI",

address = "United States",

note = "Laser-Based Micro- and Nanoprocessing XI 2017 ; Conference date: 31-01-2017 Through 02-02-2017",

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Dostovalov, AV, Korolkov, VP, Terentiev, VS, Okotrub, KA, Dultsev, FN, Nemykin, A & Babin, SA 2017, Study of TLIPSS formation on different metals and alloys and their selective etching. в U Klotzbach, K Washio & R Kling (ред.), Laser-Based Micro- and Nanoprocessing XI. том. 10092, 100921H, Proceedings of SPIE, том. 10092, SPIE, Laser-Based Micro- and Nanoprocessing XI 2017, San Francisco, Соединенные Штаты Америки, 31.01.2017. https://doi.org/10.1117/12.2251341

Study of TLIPSS formation on different metals and alloys and their selective etching. / Dostovalov, Alexandr V.; Korolkov, Victor P.; Terentiev, Vadim S.; Okotrub, Konstantin A.; Dultsev, Fedor N.; Nemykin, Anton; Babin, Sergey A.

Laser-Based Micro- and Nanoprocessing XI. ред. / U Klotzbach; K Washio; R Kling. Том 10092 SPIE, 2017. 100921H (Proceedings of SPIE; Том 10092).

Результат исследования: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › рецензирование

TY - GEN

T1 - Study of TLIPSS formation on different metals and alloys and their selective etching

AU - Dostovalov, Alexandr V.

AU - Korolkov, Victor P.

AU - Terentiev, Vadim S.

AU - Okotrub, Konstantin A.

AU - Dultsev, Fedor N.

AU - Nemykin, Anton

AU - Babin, Sergey A.

PY - 2017/1/1

Y1 - 2017/1/1

N2 - Experimental investigation of thermochemical laser-induced periodic surface structures (TLIPSS) formation on metal films (Ti, Cr, Ni, NiCr) at different processing conditions is presented. The hypothesis that the TLIPSS formation depends significantly on parabolic rate constant for oxide thin film growth is discussed. Evidently, low value of this parameter for Ni is the reason of TLIPSS absence on Ni and NiCr film with low Cr content. The effect of simultaneous ablative (with period ≈λ) and thermochemical (with period ≈λ) LIPSS formation was observed. The formation of structures after TLIPSS selective etching was demonstrated.

AB - Experimental investigation of thermochemical laser-induced periodic surface structures (TLIPSS) formation on metal films (Ti, Cr, Ni, NiCr) at different processing conditions is presented. The hypothesis that the TLIPSS formation depends significantly on parabolic rate constant for oxide thin film growth is discussed. Evidently, low value of this parameter for Ni is the reason of TLIPSS absence on Ni and NiCr film with low Cr content. The effect of simultaneous ablative (with period ≈λ) and thermochemical (with period ≈λ) LIPSS formation was observed. The formation of structures after TLIPSS selective etching was demonstrated.

KW - femtosecond laser

KW - LIPSS

KW - thermochemical modification

KW - thin metal films

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DO - 10.1117/12.2251341

M3 - Conference contribution

AN - SCOPUS:85019497978

SN - 978-1-5106-0626-5

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T3 - Proceedings of SPIE

BT - Laser-Based Micro- and Nanoprocessing XI

A2 - Klotzbach, U

A2 - Washio, K

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PB - SPIE

T2 - Laser-Based Micro- and Nanoprocessing XI 2017

Y2 - 31 January 2017 through 2 February 2017

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