@inproceedings{8febe108eaaf449a840e71eaf29761b7,
title = "Study of TLIPSS formation on different metals and alloys and their selective etching",
abstract = "Experimental investigation of thermochemical laser-induced periodic surface structures (TLIPSS) formation on metal films (Ti, Cr, Ni, NiCr) at different processing conditions is presented. The hypothesis that the TLIPSS formation depends significantly on parabolic rate constant for oxide thin film growth is discussed. Evidently, low value of this parameter for Ni is the reason of TLIPSS absence on Ni and NiCr film with low Cr content. The effect of simultaneous ablative (with period ≈λ) and thermochemical (with period ≈λ) LIPSS formation was observed. The formation of structures after TLIPSS selective etching was demonstrated.",
keywords = "femtosecond laser, LIPSS, thermochemical modification, thin metal films",
author = "Dostovalov, {Alexandr V.} and Korolkov, {Victor P.} and Terentiev, {Vadim S.} and Okotrub, {Konstantin A.} and Dultsev, {Fedor N.} and Anton Nemykin and Babin, {Sergey A.}",
year = "2017",
month = jan,
day = "1",
doi = "10.1117/12.2251341",
language = "English",
isbn = "978-1-5106-0626-5",
volume = "10092",
series = "Proceedings of SPIE",
publisher = "SPIE",
editor = "U Klotzbach and K Washio and R Kling",
booktitle = "Laser-Based Micro- and Nanoprocessing XI",
address = "United States",
note = "Laser-Based Micro- and Nanoprocessing XI 2017 ; Conference date: 31-01-2017 Through 02-02-2017",
}