Structure and elemental composition of transparent nanocomposite silicon oxycarbonitride films

Химические соединения

• Silicon 100%
• Nanocomposites 78%
• Gas mixtures 60%
• Chemical analysis 47%
• Optical emission spectroscopy 38%
• Nanocomposite films 37%
• Chemical bonds 35%
• Plasma enhanced chemical vapor deposition 32%
• Nitrogen 24%
• Gases 23%
• Thermodynamics 22%
• Oxygen 21%
• Decomposition 20%
• Plasmas 20%
• Temperature 19%

Технические дисциплины и материаловедение

• Nanocomposites 78%
• Gas mixtures 60%
• Silicon 59%
• Chemical analysis 47%
• Optical emission spectroscopy 38%
• Nanocomposite films 37%
• Chemical bonds 35%
• Plasma enhanced chemical vapor deposition 32%
• Thermodynamics 22%
• Nitrogen 21%
• Decomposition 20%
• Plasmas 20%
• Temperature 19%
• Oxygen 18%
• Gases 15%

Физика и астрономия

General

1. silicon films 95%
2. vapor phases 21%
3. decomposition 20%
4. thermodynamics 19%
5. simulation 12%
6. energy 9%

Chemistry and Materials

1. nanocomposites 77%
2. gas mixtures 55%
3. chemical bonds 32%
4. nitrogen 20%
5. oxygen 16%

Aerospace Sciences

1. optical emission spectroscopy 33%
2. spectroscopy 14%

Physics

1. temperature 18%

Engineering

1. x rays 12%