Structural characteristics of diamond-like carbon films synthesized by different methods

Alexander Zolkin, Anna Semerikova, Sergey Chepkasov, Maxim Khomyakov

Результат исследования: Публикации в книгах, отчётах, сборниках, трудах конференцийстатья в сборнике материалов конференциинаучнаярецензирование

Аннотация

In the present study, the Raman spectra of diamond-like amorphous (a-C) and hydrogenated amorphous (a-C:H) carbon films on silicon obtained using the ion-beam methods and the pulse cathodic arc deposition technique were investigated with the aim of elucidating the relation between the hardness and structure of the films. The hardness of the samples used in the present study was 19-45 GPa. Hydrogenated carbon films were synthesized using END-Hall ion sources and a linear anode layer ion source (LIS) on single-crystal silicon substrates. The gas precursors were CH4 and C3H8, and the rate of the gas flow fed into the ion source was 4.4 to 10 sccm. The ion energies ranged from 150 to 600 eV. a-C films were deposited onto Si substrates using the pulse cathodic arc deposition technique. The films obtained by the pulse arc technique contained elements with an ordered structure. In the films synthesized using low-(150 eV) and high-energy (600 eV) ions beams, an amorphous phase was the major phase. The significant blurriness of the diffraction rings in the electron diffraction patterns due to a large film thickness (180-250 nm) did not allow distinctly observing the signals from the elements with an ordered structure against the background of an amorphous phase.

Язык оригиналаанглийский
Название основной публикацииHigh Technology
Подзаголовок основной публикацииResearch and Applications 2016 - HTRA-2016
ИздательTrans Tech Publications Ltd
Страницы112-117
Число страниц6
Том743 KEM
ISBN (печатное издание)9783035711356
DOI
СостояниеОпубликовано - 1 янв 2017
Событие5th International Science and Engineering Conference on High Technology: Research and Applications, HTRA 2016 - Tomsk, Российская Федерация
Продолжительность: 5 дек 20167 дек 2016

Серия публикаций

НазваниеKey Engineering Materials
Том743 KEM
ISSN (печатное издание)1013-9826
ISSN (электронное издание)1662-9795

Конференция

Конференция5th International Science and Engineering Conference on High Technology: Research and Applications, HTRA 2016
СтранаРоссийская Федерация
ГородTomsk
Период05.12.201607.12.2016

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  • Цитировать

    Zolkin, A., Semerikova, A., Chepkasov, S., & Khomyakov, M. (2017). Structural characteristics of diamond-like carbon films synthesized by different methods. В High Technology: Research and Applications 2016 - HTRA-2016 (Том 743 KEM, стр. 112-117). (Key Engineering Materials; Том 743 KEM). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.743.112