Step bunching phenomena on Si(0 0 1) surface induced by DC heating during sublimation and Si deposition

Физика и астрономия

Engineering

1. bunching 100%
2. sublimation 88%
3. direct current 66%
4. heating 53%
5. annealing 7%

Physics

1. ultrahigh vacuum 11%
2. temperature 11%

General

1. electron microscopy 10%
2. atomic force microscopy 9%
3. exponents 9%
4. activation energy 8%
5. scaling 8%

Химические соединения

• Sublimation 99%
• Heating 57%
• Ultrahigh vacuum 31%
• Temperature 27%
• Electron microscopy 27%
• Atomic force microscopy 25%
• Activation energy 22%
• Annealing 20%

Технические дисциплины и материаловедение

• Sublimation 99%
• Heating 57%
• Ultrahigh vacuum 31%
• Temperature 27%
• Electron microscopy 27%
• Atomic force microscopy 25%
• Activation energy 22%
• Annealing 20%