Spectral characteristics of inductively coupled plasma of water vapor

The paper presents the results of experimental measurements of the emission properties of water plasma in an inductive discharge. The power of the inductive discharge was 600 W at a frequency of 27 MHz and a pressure from 0.25 to 4 mbar. Plasma temperature was estimated from the Balmer hydrogen series using relative intensities method. It is shown that in this pressure range, the plasma is not in equilibrium and the energy difference between individual excited states increased with distance from the tube axis. The plasma heating time was estimated from the dynamics of the spectral line intensities to be 200 ms.