Short-Range Order in Amorphous and Crystalline Ferroelectric Hf0.5Zr0.5O2

S. B. Erenburg, S. V. Trubina, K. O. Kvashnina, V. N. Kruchinin, V. V. Gritsenko, A. G. Chernikova, A. M. Markeev

Результат исследования: Научные публикации в периодических изданияхстатьярецензирование

2 Цитирования (Scopus)

Аннотация

The microstructures of amorphous and polycrystalline ferroelectric Hf0.5Zr0.5O2 films are studied by X-ray spectroscopy and ellipsometry. EXAFS spectra demonstrate that the amorphous film consists of an “incompletely mixed” solid solution of metallic oxides HfO2 and ZrO2. After rapid thermal annealing, the mixed Hf0.5Zr0.5O2 oxide films have a more ordered polycrystalline structure, and individual Hf and Zr monoxide islands are formed in the films. These islands are several nanometers in size and have a structure that is similar to the monoclinic structure of HfO2 and ZrO2. The presence of the HfO2 and ZrO2 phases in the Hf0.5Zr0.5O2 films is also detected by ellipsometry.

Язык оригиналаанглийский
Страницы (с-по)816-824
Число страниц9
ЖурналJournal of Experimental and Theoretical Physics
Том126
Номер выпуска6
DOI
СостояниеОпубликовано - 1 июн 2018

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