Shapes of the micron-sized SiGe islands grown on Si(100) in Dewetting Conditions

Anastasia E. Budazhapova; Alexander A. Shklyaev

doi:10.1109/EDM.2018.8434951

Shapes of the micron-sized SiGe islands grown on Si(100) in Dewetting Conditions

Anastasia E. Budazhapova, Alexander A. Shklyaev

Физический факультет

Результат исследования: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › рецензирование

1 Цитирования (Scopus)

Аннотация

The shape of the islands formed during the Ge deposition on Si(100) surfaces in dewetting conditions is analyzed on the basis of surface layer energy minimization. An analytical expression for the total energy is derived for the sphere segment-shaped islands with contact angles up to 180° with respect to the substrate. It is found that the island shape is determined by the balance between the surface energy of the Si substrate areas located around the islands and the elastic energy of the areas around the island/substrate interface.

Язык оригинала	английский
Название основной публикации	2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018 - Proceedings
Издатель	IEEE Computer Society
Страницы	16-18
Число страниц	3
Том	2018-July
ISBN (печатное издание)	9781538650219
DOI	https://doi.org/10.1109/EDM.2018.8434951
Состояние	Опубликовано - 13 авг 2018
Событие	19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018 - Erlagol, Altai, Российская Федерация Продолжительность: 29 июн 2018 → 3 июл 2018

Конференция

Конференция	19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018
Страна	Российская Федерация
Город	Erlagol, Altai
Период	29.06.2018 → 03.07.2018

Доступ к документу

10.1109/EDM.2018.8434951

Link to publication in Scopus

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Цитировать

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title = "Shapes of the micron-sized SiGe islands grown on Si(100) in Dewetting Conditions",

abstract = "The shape of the islands formed during the Ge deposition on Si(100) surfaces in dewetting conditions is analyzed on the basis of surface layer energy minimization. An analytical expression for the total energy is derived for the sphere segment-shaped islands with contact angles up to 180° with respect to the substrate. It is found that the island shape is determined by the balance between the surface energy of the Si substrate areas located around the islands and the elastic energy of the areas around the island/substrate interface.",

keywords = "Island shapes, Solid-state dewetting, Surface layer energy",

author = "Budazhapova, {Anastasia E.} and Shklyaev, {Alexander A.}",

year = "2018",

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booktitle = "2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018 - Proceedings",

publisher = "IEEE Computer Society",

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note = "19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018 ; Conference date: 29-06-2018 Through 03-07-2018",

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Budazhapova, AE & Shklyaev, AA 2018, Shapes of the micron-sized SiGe islands grown on Si(100) in Dewetting Conditions. в 2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018 - Proceedings. том. 2018-July, 8434951, IEEE Computer Society, стр. 16-18, 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018, Erlagol, Altai, Российская Федерация, 29.06.2018. https://doi.org/10.1109/EDM.2018.8434951

Shapes of the micron-sized SiGe islands grown on Si(100) in Dewetting Conditions. / Budazhapova, Anastasia E.; Shklyaev, Alexander A.

2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018 - Proceedings. Том 2018-July IEEE Computer Society, 2018. стр. 16-18 8434951.

Результат исследования: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › рецензирование

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AU - Budazhapova, Anastasia E.

AU - Shklyaev, Alexander A.

PY - 2018/8/13

Y1 - 2018/8/13

N2 - The shape of the islands formed during the Ge deposition on Si(100) surfaces in dewetting conditions is analyzed on the basis of surface layer energy minimization. An analytical expression for the total energy is derived for the sphere segment-shaped islands with contact angles up to 180° with respect to the substrate. It is found that the island shape is determined by the balance between the surface energy of the Si substrate areas located around the islands and the elastic energy of the areas around the island/substrate interface.

AB - The shape of the islands formed during the Ge deposition on Si(100) surfaces in dewetting conditions is analyzed on the basis of surface layer energy minimization. An analytical expression for the total energy is derived for the sphere segment-shaped islands with contact angles up to 180° with respect to the substrate. It is found that the island shape is determined by the balance between the surface energy of the Si substrate areas located around the islands and the elastic energy of the areas around the island/substrate interface.

KW - Island shapes

KW - Solid-state dewetting

KW - Surface layer energy

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U2 - 10.1109/EDM.2018.8434951

DO - 10.1109/EDM.2018.8434951

M3 - Conference contribution

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SN - 9781538650219

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BT - 2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018 - Proceedings

PB - IEEE Computer Society

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Y2 - 29 June 2018 through 3 July 2018

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