Аннотация

The method of producing nano-dimensional silicon powders from monosilane pyrolysis by compressing in a cyclic process in the flow reactor has been proposed and implemented. The resulting powder has been examined by X-ray diffraction and electron microscopy. The new design solutions and ceramic coatings obtained by using microarc oxidation for the piston-cylinder assembly - a compression unit of the reactor, allowed avoiding the use of compression rings and lubricants and achieving high compression ratio, pressure and temperature in the reactor needed for monosilane pyrolysis. Pyrolysis in the flow reactor is convenient, technological and efficient to be used in the production of high purity silicon nanopowders.

Язык оригиналаанглийский
Номер статьи012136
Число страниц4
ЖурналJournal of Physics: Conference Series
Том1105
Номер выпуска1
DOI
СостояниеОпубликовано - 28 ноя 2018
Событие34th Siberian Thermophysical Seminar Dedicated to the 85th Anniversary of Academician A. K. Rebrov, STS 2018 - Novosibirsk, Российская Федерация
Продолжительность: 27 авг 201830 авг 2018

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