@inproceedings{38bb76829fa243c6b15fe73a6be1b413,
title = "Picosecond infrared laser crystallization of Ge layers in Ge/Si multi-nanolayers for optoelectronic applications",
abstract = "The processes involved in picosecond infrared pulsed laser annealing of multylayer structures consisting of alternating thin films of amorphous silicon and germanium were investigated. The films were fabricated by plasma-chemical deposition on Si(001) and glass substrates. An analysis of structural transformation of Ge/Si multi-nanolayers was performed using Raman spectroscopy. Regimes of annealing were found when the Ge layers are partially crystallized while the Si layers remain amorphous without noticeable intermixing of Ge and Si. The developed approach can be used for creation of GeSi solid alloys (which can be used in memristors on not refractive substrates) and also for creation of Si based p-i-n structures on non-refractory substrates with Ge nanoclusters in i-layer, that can enhance the efficiency of thin film solar cells.",
keywords = "Ge/Si multi-nanolayers, Nonlinear effects in light absorption, Picosecond infrared pulsed laser annealing, Raman spectroscopy",
author = "Volodin, {V. A.} and Krivyakin, {G. K.} and Bulgakov, {A. V.} and Y. Levy and J. Ber{\'a}nek and S. Nagisetty and Z. Bryknar and Bulgakova, {N. M.} and Geydt, {P. V.} and Popov, {A. A.}",
note = "Funding Information: This work was supported by the Ministry of Education and Science of the Russian Federation, grant FSUS-2020-0029. A.V.B., Y.L., J.B., S.N. and N.M.B. acknowledge the support of the European Regional Development Fund and the state budget of the Czech Republic (project BIATRI: No. CZ.02.1.01/0.0/0.0/15_003/0000445, project HiLASE CoE: No. CZ.02.1.01/0.0/0.0/15_006/0000674, programme NPU I: project No.LO1602). The research of Z.B. has been supported by the European Structural and Investment Funds and the state budget of the Czech Republic within Center of Advanced Applied Sciences, Reg. No. CZ.02.1.01/0.0/0.0/16_019/0000778. The work of J.B. was also partially supported by the Grant Agency of the Czech Technical University in Prague No.SGS19/188/OHK4/3T/14. Publisher Copyright: {\textcopyright} 2022 SPIE.; 14th International Conference on Micro- and Nano-Electronics 2021, ICMNE 2021 ; Conference date: 04-10-2021 Through 08-10-2021",
year = "2022",
doi = "10.1117/12.2622731",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Lukichev, {Vladimir F.} and Rudenko, {Konstantin V.}",
booktitle = "International Conference on Micro- and Nano-Electronics 2021",
address = "United States",
}