Photonic metasurface made of array of lens-like SiGe Mie resonators formed on (100) Si substrate via dewetting

Vladimir Poborchii, Alexander Shklyaev, Leonid Bolotov, Noriyuki Uchida, Tetsuya Tada, Zhandos N. Utegulov

Результат исследования: Научные публикации в периодических изданияхстатья

10 Цитирования (Scopus)

Аннотация

Metasurfaces consisting of arrays of high-index Mie resonators concentrating/redirecting light are important for integrated optics, photodetectors, and solar cells. Herein, we report the optical properties of low-Ge-content SiGe lens-like Mie resonator island arrays fabricated via dewetting during Ge deposition on a Si(100) surface at approximately 900 °C. We observe enhancement of the Si interaction with light owing to the efficient island-induced light concentration in the submicron-depth Si layer, which is mediated by both near-field Mie resonance leaking into the substrate and far-field light focusing. Such metasurfaces can improve the Si photodetector and solar-cell performance.

Язык оригиналаанглийский
Номер статьи125501
Число страниц4
ЖурналApplied Physics Express
Том10
Номер выпуска12
DOI
СостояниеОпубликовано - 1 дек 2017

Fingerprint Подробные сведения о темах исследования «Photonic metasurface made of array of lens-like SiGe Mie resonators formed on (100) Si substrate via dewetting». Вместе они формируют уникальный семантический отпечаток (fingerprint).

Цитировать