Peculiarities of the AlN crystalline phase formation in a result of the electron-stimulated reconstruction transition (√31×√31)R ± 9° − (1 × 1)

D. S. Milakhin, T. V. Malin, V. G. Mansurov, Yu G. Galitsyn, A. S. Kozhukhov, D. E. Utkin, K. S. Zhuravlev

Результат исследования: Научные публикации в периодических изданияхстатьярецензирование

Аннотация

In the present work, it was found for the first time that an electron beam used in reflection high-energy electron diffraction technique stimulates a reconstruction transition from a sapphire (√31×√31)R ± 9° superstructure which is chemically inert under an ammonia flux to an unreconstructed (1 × 1) structure with subsequent surface nitridation. The electron beam initiates electron-stimulated oxygen desorption from the sapphire surface followed by formation of oxygen vacancies, which are potential energetically accessible centers for the primary nuclei formation of the AlN crystalline phase.

Язык оригиналаанглийский
Номер статьи148548
ЖурналApplied Surface Science
Том541
Ранняя дата в режиме онлайн26 ноя 2020
DOI
СостояниеОпубликовано - 1 мар 2021

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