@article{c4251d173d8a4a13a5ac8b4a0e3379ce,
title = "Peculiarities of the AlN crystalline phase formation in a result of the electron-stimulated reconstruction transition (√31×√31)R ± 9° − (1 × 1)",
abstract = "In the present work, it was found for the first time that an electron beam used in reflection high-energy electron diffraction technique stimulates a reconstruction transition from a sapphire (√31×√31)R ± 9° superstructure which is chemically inert under an ammonia flux to an unreconstructed (1 × 1) structure with subsequent surface nitridation. The electron beam initiates electron-stimulated oxygen desorption from the sapphire surface followed by formation of oxygen vacancies, which are potential energetically accessible centers for the primary nuclei formation of the AlN crystalline phase.",
keywords = "(√31×√31)R±9° superstructure, Aluminum nitride, Ammonia molecular-beam epitaxy, Reflection high-energy electron diffraction, Sapphire",
author = "Milakhin, {D. S.} and Malin, {T. V.} and Mansurov, {V. G.} and Galitsyn, {Yu G.} and Kozhukhov, {A. S.} and Utkin, {D. E.} and Zhuravlev, {K. S.}",
note = "Funding Information: This work was financially supported by the Russian Foundation for Basic Research (Grants No. 21-52-46001 and No. 21-52-15009 ). The SEM and AFM diagnostics were performed on the equipment of Core Facilities Centre «Technologies for nanostructuring of semiconductor, metal, carbon, bioorganic materials and analytical methods for their study at the nanoscale» (CKP «Nanostructure»). Publisher Copyright: {\textcopyright} 2020 Elsevier B.V. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.",
year = "2021",
month = mar,
day = "1",
doi = "10.1016/j.apsusc.2020.148548",
language = "English",
volume = "541",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",
}