A parametric model describing the spectra of optical constants n(λ) and k(λ) of a Hg1 – xCdxTe (MCT) solid solution for the x values in the range from 0.2 to 0.4 is developed. This model is based on empirical data measured in situ during the epitaxial growth of solid-solution layers. Several versions of application of the obtained model for in situ real-time determination of the MCT composition have been considered. A technique for determining the composition using spectral ellipsometric measurements is proposed, which ensures the error of no more than δx = ±0.0035.
Предметные области OECD FOS+WOS
- 2.05 ТЕХНОЛОГИЯ МАТЕРИАЛОВ
- 1.03 ФИЗИЧЕСКИЕ НАУКИ И АСТРОНОМИЯ