On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator

T. D. Akhmetov; A. A. Ivanov; I. V. Shikhovtsev

doi:10.1134/S1063780X21070011

On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator

T. D. Akhmetov, A. A. Ivanov, I. V. Shikhovtsev

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

Аннотация

In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.

Язык оригинала	английский
Страницы (с-по)	732-741
Число страниц	10
Журнал	Plasma Physics Reports
Том	47
Номер выпуска	7
DOI	https://doi.org/10.1134/S1063780X21070011
Состояние	Опубликовано - июл 2021

Предметные области OECD FOS+WOS

1.03 ФИЗИЧЕСКИЕ НАУКИ И АСТРОНОМИЯ

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10.1134/S1063780X21070011

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abstract = "In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.",

keywords = "antenna, magnetostatics, plasma generator, quasi-stationary approximation, shield, solenoid, vortex field",

author = "Akhmetov, {T. D.} and Ivanov, {A. A.} and Shikhovtsev, {I. V.}",

note = "Funding Information: The authors are grateful to Dr. V.I. Davydenko for the interest in this work and useful remarks. Publisher Copyright: {\textcopyright} 2021, Pleiades Publishing, Ltd.",

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On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator. / Akhmetov, T. D.; Ivanov, A. A.; Shikhovtsev, I. V.

В: Plasma Physics Reports, Том 47, № 7, 07.2021, стр. 732-741.

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

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