On electron attachment effect on characteristics of the DBD in chlorine and its mixtures with xenon

The electron attachment effect on DBD characteristics in chlorine and its mixtures with xenon has been studied. Characteristics of the DBDs in pure chlorine and in xenon-chlorine mixtures with a chlorine fraction of 0.1-5% were modeled using the fluid model. It is shown that the electron attachment limits a magnitude of the DBD current, contributes to formation of multiple current spikes, appearance of a double layer near the dielectric surface and formation of XeCl∗ excimer molecules, and leads to a redistribution of the power deposited into the discharge: more power is deposited into ions and less power is deposited into electrons.