@inproceedings{e2c5a52a76b14a889773001b559de2e8,
title = "Numerical modelling of ferromagnetic enhanced inductively coupled plasma discharge parameters in oxygen",
abstract = "Global model for a low-frequency inductive discharge in pure oxygen is presented. Calculations of all basic plasma parameters were performed in a range of gas pressure of 0.1-10 Pa and a range of discharge power of 100-4000W for a large gas discharge chamber. It was found that plasma electronegativity changes non-monotonously with gas pressure and discharge power with a maximum at gas pressure of 1 Pa and discharge power of 1000 W.",
keywords = "Ferromagnetic enhanced ICP, Global model, Large scale plasma processingio, Oxygen discharge",
author = "Nikon Demin and Alexander Fedoseev and Gennady Sukhinin and Mikhail Isupov",
note = "Funding Information: The work was supported by the Russian Science Foundation, grant No. 18-19-00205. Funding Information: ACKNOWLEDGMENT The work was supported by the Russian Science Foundation, grant No. 18-19-00205. Publisher Copyright: {\textcopyright} 2020 IEEE. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 ; Conference date: 14-09-2020 Through 26-09-2020",
year = "2020",
month = sep,
day = "14",
doi = "10.1109/EFRE47760.2020.9242073",
language = "English",
series = "Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "657--661",
booktitle = "Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020",
address = "United States",
}