Near-field infrared spectroscopy of SiOx nanowires

I. A. Milekhin; A. S. Kozhukhov; D. V. Sheglov; L. I. Fedina; A. G. Milekhin; A. V. Latyshev; D. R.T. Zahn

doi:10.1016/j.apsusc.2022.152583

Near-field infrared spectroscopy of SiO_x nanowires

I. A. Milekhin, A. S. Kozhukhov, D. V. Sheglov, L. I. Fedina, A. G. Milekhin, A. V. Latyshev, D. R.T. Zahn

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

Аннотация

Scanning-probe-based patterning methods including local anodic oxidation have been widely used in nanotechnology to form various nanoelectronic device structures. However, so far spectroscopic investigations e.g. to determine the stoichiometry of oxide nanostructures with characteristic sizes below the diffraction limit do not exist. Using near-field infrared spectroscopy, we study the vibrational optical modes in SiO_x nanowires with a height (width) of 2.1 nm (350 nm). The nanowires were produced by oxidation employing an atomic force microscope (AFM) on wide Si (1 1 1) terraces. The analysis of the spectroscopic data allows us to determine the composition of SiO_x with a spatial resolution far below the diffraction limit. The composition × across SiO_x nanowires is found to decrease from 1.6 in the center of the nanowire to 1.4 at its edges.

Язык оригинала	английский
Номер статьи	152583
Журнал	Applied Surface Science
Том	584
DOI	https://doi.org/10.1016/j.apsusc.2022.152583
Состояние	Опубликовано - 15 мая 2022

Предметные области OECD FOS+WOS

2.05 ТЕХНОЛОГИЯ МАТЕРИАЛОВ
1.03 ФИЗИЧЕСКИЕ НАУКИ И АСТРОНОМИЯ
1.04 ХИМИЧЕСКИЕ НАУКИ

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10.1016/j.apsusc.2022.152583

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title = "Near-field infrared spectroscopy of SiOx nanowires",

abstract = "Scanning-probe-based patterning methods including local anodic oxidation have been widely used in nanotechnology to form various nanoelectronic device structures. However, so far spectroscopic investigations e.g. to determine the stoichiometry of oxide nanostructures with characteristic sizes below the diffraction limit do not exist. Using near-field infrared spectroscopy, we study the vibrational optical modes in SiOx nanowires with a height (width) of 2.1 nm (350 nm). The nanowires were produced by oxidation employing an atomic force microscope (AFM) on wide Si (1 1 1) terraces. The analysis of the spectroscopic data allows us to determine the composition of SiOx with a spatial resolution far below the diffraction limit. The composition × across SiOx nanowires is found to decrease from 1.6 in the center of the nanowire to 1.4 at its edges.",

keywords = "Atomic force microscopy, Local anodic oxidation, Near-field infrared spectroscopy, Optical phonons, Silicon oxide nanowire",

author = "Milekhin, {I. A.} and Kozhukhov, {A. S.} and Sheglov, {D. V.} and Fedina, {L. I.} and Milekhin, {A. G.} and Latyshev, {A. V.} and Zahn, {D. R.T.}",

note = "Funding Information: The authors gratefully acknowledge financial support from the Volkswagen Foundation, MERGE project (TU Chemnitz), DFG project (Grant No.ZA 146/43-1), DFG project (Grant No. ZA 146/44-1) and the Russian Foundation for Basic Research (project 18-29-20066 MK). AFM LAO growth was carried out by using the equipment of the shared-user facility “Nanostructures” in the ISP Center. Publisher Copyright: {\textcopyright} 2022 Elsevier B.V.",

year = "2022",

month = may,

day = "15",

doi = "10.1016/j.apsusc.2022.152583",

language = "English",

volume = "584",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

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AU - Milekhin, I. A.

AU - Kozhukhov, A. S.

AU - Sheglov, D. V.

AU - Fedina, L. I.

AU - Milekhin, A. G.

AU - Latyshev, A. V.

AU - Zahn, D. R.T.

N1 - Funding Information: The authors gratefully acknowledge financial support from the Volkswagen Foundation, MERGE project (TU Chemnitz), DFG project (Grant No.ZA 146/43-1), DFG project (Grant No. ZA 146/44-1) and the Russian Foundation for Basic Research (project 18-29-20066 MK). AFM LAO growth was carried out by using the equipment of the shared-user facility “Nanostructures” in the ISP Center. Publisher Copyright: © 2022 Elsevier B.V.

PY - 2022/5/15

Y1 - 2022/5/15

N2 - Scanning-probe-based patterning methods including local anodic oxidation have been widely used in nanotechnology to form various nanoelectronic device structures. However, so far spectroscopic investigations e.g. to determine the stoichiometry of oxide nanostructures with characteristic sizes below the diffraction limit do not exist. Using near-field infrared spectroscopy, we study the vibrational optical modes in SiOx nanowires with a height (width) of 2.1 nm (350 nm). The nanowires were produced by oxidation employing an atomic force microscope (AFM) on wide Si (1 1 1) terraces. The analysis of the spectroscopic data allows us to determine the composition of SiOx with a spatial resolution far below the diffraction limit. The composition × across SiOx nanowires is found to decrease from 1.6 in the center of the nanowire to 1.4 at its edges.

AB - Scanning-probe-based patterning methods including local anodic oxidation have been widely used in nanotechnology to form various nanoelectronic device structures. However, so far spectroscopic investigations e.g. to determine the stoichiometry of oxide nanostructures with characteristic sizes below the diffraction limit do not exist. Using near-field infrared spectroscopy, we study the vibrational optical modes in SiOx nanowires with a height (width) of 2.1 nm (350 nm). The nanowires were produced by oxidation employing an atomic force microscope (AFM) on wide Si (1 1 1) terraces. The analysis of the spectroscopic data allows us to determine the composition of SiOx with a spatial resolution far below the diffraction limit. The composition × across SiOx nanowires is found to decrease from 1.6 in the center of the nanowire to 1.4 at its edges.

KW - Atomic force microscopy

KW - Local anodic oxidation

KW - Near-field infrared spectroscopy

KW - Optical phonons

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