A new low-temperature fabrication method of SiO x -TiO 2 core-shell nanowires (NWs) for photocatalytic application was suggested. In the present work, the gas-jet electron beam plasma chemical vapor deposition method was used to synthesize arrays of oriented bundles (microropes) of silicon oxide NWs. Tin nanoparticles were used as catalyst for the NW growth via the “vapor-liquid-solid” mechanism at a temperature of 335 °C. A conformal nanocrystalline TiO 2 coating was then deposited by atomic layer deposition using TiCl 4 and H 2 O at 300 °C. Anatase phase formation was confirmed by Raman spectroscopy and X-ray diffraction. The photocatalytic characteristics of the fabricated arrays were demonstrated by the example of the photo-oxidation reaction of acetone vapor. Options for further development and advantages of the method such as low temperature, scalability and good compatibility of the fabrication stages are discussed.