Influence of the temperature of molybdenum substrates on the structure of diamond coatings obtained by chemical vapor deposition from a high-speed microwave plasma jet

Yu V. Fedoseeva, D. V. Gorodetskiy, A. A. Makarova, I. B. Yudin, N. I. Timoshenko, M. Yu Plotnikov, A. A. Emelyanov, A. K. Rebrov, A. V. Okotrub

Результат исследования: Научные публикации в периодических изданияхстатьярецензирование

1 Цитирования (Scopus)

Аннотация

We present a study of structural features of diamond coatings prepared by chemical vapor deposition from a hydrogen/methane mixture activated by a microwave discharge using a high-speed jet to transport the mixture to molybdenum substrates heated up to 525 °C, 690 °C, and 1000 °C. The influence of the substrate temperature on morphology, composition, and structure of diamond coatings are studied by scanning electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, and near edge X-ray absorption fine structure. The diamond crystals enlarge in size, their density on the substrate increases, while the quality and the crystal surface purity are enhanced as a result of temperature increase.

Язык оригиналаанглийский
Страницы (с-по)153-162
Число страниц10
ЖурналJournal of Structural Chemistry
Том62
Номер выпуска1
DOI
СостояниеОпубликовано - янв 2021

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