In this work, we demonstrate the application of a Metal-Organic Chemical Vapor Deposition (MOCVD) technique for deposition of the palladium electrodes on the surface of metal phthalocyanine films. It is expected that these hybrid multifunctional materials can be effective chemical sensors for hydrogen detection. Two palladium β-diketonate derivatives, palladium hexafluoroacetylacetonate Pd(hfac)2 and novel Pd(NMe2i-acac)2 were synthesized and characterized. Pd(NMe2i-acac)2 was shown to transfer to the gaseous phase with decomposition. Pd(hfac)2 was used as a precursor in MOCVD processes. The structure and morphology of Pd layers deposited both on Si(100) substrate and on the surface of metal phthalocyanine films were studied by means of XRD and scanning electron microscopy. The influence of the deposition of Pd as a top layer on the phase composition of metal phthalocyanine films was also discussed.