@article{74c596cf5a4c4b92b6906562eec98e8b,
title = "High-quality single-crystal diamond-graphite-diamond membranes and devices",
abstract = "Implantation of hydrogen ions into synthetic single-crystal diamonds followed by subsequent high-temperature annealing and anodic etching of implanted crystals was used to obtain structurally perfect 30-nm thick diamond membranes with optically active NV- centres (area up to several tens mm(2)) appropriate for use in integral magnetometers and quantum-informatics optoelectronic circuits.",
keywords = "implantation of hydrogen ions, high-pressure-high-temperature-annealing, anodic etching, single-crystal diamond-graphite-diamond layers and membranes, optically active NV- centres, HYDROGEN IMPLANTATION, FABRICATION, NITROGEN, LAYERS",
author = "Popov, {V. P.} and Gutakovskii, {A. K.} and Antonov, {V. A.} and Podlesnyi, {S. N.} and Kupriyanov, {I. N.} and Palyanov, {Yu N.} and Rubanov, {S. V.}",
year = "2015",
doi = "10.1504/IJNT.2015.067208",
language = "English",
volume = "12",
pages = "226--237",
journal = "International journal of nanotechnology",
issn = "1475-7435",
publisher = "Inderscience Enterprises Ltd",
number = "3-4",
}