Graphene transfer from a copper surface to a silicon substrate

D. V. Smovzh, I. A. Kostogrud, E. V. Boyko, M. A. Morozova

Результат исследования: Научные публикации в периодических изданияхстатья по материалам конференциирецензирование

Аннотация

The article presents a comparison of two methods of transferring single-layer graphene onto silicon substrates using poly (methyl methacrylate) (PMMA) and thermo-adhesive tape. The continuity of the transferred coating and the quality of the graphene film after the transfer stage were investigated. An analysis of the contaminants formed during the transfer of the graphene surface is carried out. It is shown that when using PMMA for transfer, heating of the samples leads to their damage due to thermal expansion and the formation of indelible impurities on the surface.

Язык оригиналаанглийский
Номер статьи012098
ЖурналJournal of Physics: Conference Series
Том1675
Номер выпуска1
DOI
СостояниеОпубликовано - 15 дек 2020
Событие5th All-Russian Scientific Conference Thermophysics and Physical Hydrodynamics with the School for Young Scientists, TPH 2020 - Yalta, Crimea, Украина
Продолжительность: 13 сен 202020 сен 2020

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