Generation of accelerated cluster-ion beams for nanotechnology: 21-th International Symposium on Plasma Chemistry (ISPC 21). 4 – 9 August 2013. Cairns, Australia. Proceedings.

Результат исследования: Материалы конференцийматериалырецензирование


Formation of keV-energy Ar cluster ion beam is studied. Optimum condition for
formation high intensity cluster beam with 2*1016 clusters/sm2*sec investigated both experimentally and by numerical simulation. The mass distributions of the accelerated cluster ion beam were measured. It has been demonstrated that mass spectrum of cluster ion depend of collision processes between the ions during the formation.
Язык оригиналаанглийский
Число страниц3
СостояниеОпубликовано - 2013