@inproceedings{baca80795d8448b28d2a9075d5d6a977,
title = "Formation of two-dimensional photonic crystals by electron-beam lithography",
abstract = "The approach to formation of two-dimensional photonic crystals with preset sizes of elements by the electron-beam lithography (EBL) is presented. The main problems appearing during formation of these structures are considered.",
keywords = "lithography, Photonic crystal, Proximity effect",
author = "Utkin, {Dmitry E.} and Nasimov, {Dmitry A.}",
year = "2011",
doi = "10.1109/EDM.2011.6006911",
language = "English",
isbn = "9781612847955",
series = "12th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2011 - Proceedings",
pages = "119--121",
booktitle = "12th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2011 - Proceedings",
note = "12th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2011 ; Conference date: 30-06-2011 Through 04-07-2011",
}