Irradiation of a metallic film with ultrashort high-energy laser pulses in a visible and near-infrared wavelength range leads to the formation of so-called laser-induced periodic surface structures (LIPSS) due to non-linear light absorption. These structures represent arrays of parallel protrusions or valleys on the surface of the material and the mechanism of their formation is an actively discussed topic  , . Large areas of the material surface can be covered with LIPSS by scanning a sample with a laser beam. Morphology of LIPSS (period, orientation, modulation depth, uniformity, etc.), as well as their chemical composition, depends on the properties of the chosen material, film thickness, and irradiation parameters. Metals with relatively low surface plasmon mean free path  and high oxidation rate  support the formation of highly ordered LIPSS at high scanning speeds, and metals of the titanium subgroup (Zr, Hf) are especially interesting in this regard.