Formation of thermochemical laser-induced periodic structures on titanium films in a nitrogen-rich atmosphere

Kirill Bronnikov, Alexander Dostovalov, Konstantin Okotrub, Aleksandr Kuchmizhak, Victor Korolkov, Sergey Babin

Результат исследования: Публикации в книгах, отчётах, сборниках, трудах конференцийстатья в сборнике материалов конференциинаучнаярецензирование

Аннотация

Recently, highly regular thermochemical laser-induced periodic surface structures (TLIPSS) have become the subject of active studies. TLIPSS are formed in the interference maxima due to the local oxidation of the material irradiated with ultrashort laser pulses and are characterized by the elevation of the relief that forms parallel oxide protrusions. The gas surrounding is expected to affect the morphology and chemical composition of the resulting TLIPSS; however, such effects were rarely studied so far. Here we present the results of the TLIPSS fabrication on glass-supported Si-Ti bilayer films using an astigmatic Gaussian IR femtosecond beam both in air and a nitrogen-rich atmosphere. The formation of ordered TLIPSS with the period of ≈ 920 nm is observed at slow scanning speeds (∼1 μm/s) and low fluences in a nitrogen-rich atmosphere. Raman spectroscopy revealed the presence of TiO2 (rutile) peaks, as well as bands centered at 280 cm-1 and 320 cm-1, which can be related to TiN in amorphous and polycrystalline phase.

Язык оригиналаанглийский
Название основной публикацииAdvanced Laser Processing and Manufacturing V
РедакторыRongshi Xiao, Minghui Hong, Jianhua Yao, Yuji Sano
ИздательSPIE
ISBN (электронное издание)9781510646339
DOI
СостояниеОпубликовано - 2021
СобытиеAdvanced Laser Processing and Manufacturing V 2021 - Nantong, Китай
Продолжительность: 11 окт. 202112 окт. 2021

Серия публикаций

НазваниеProceedings of SPIE - The International Society for Optical Engineering
Том11892
ISSN (печатное издание)0277-786X
ISSN (электронное издание)1996-756X

Конференция

КонференцияAdvanced Laser Processing and Manufacturing V 2021
Страна/TерриторияКитай
ГородNantong
Период11.10.202112.10.2021

Предметные области OECD FOS+WOS

  • 1.03 ФИЗИЧЕСКИЕ НАУКИ И АСТРОНОМИЯ

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