Аннотация
The arrays formation of submicron- and micron-sized SiGe and Ge dielectric particles on the Si and SiO2 surfaces, which occur due to solid-state dewetting, is investigated. The shape of the particles and their spatial distribution turned out to be strongly dependent on the crystallographic Si surface orientation, the amount of deposited Ge and the Ge deposition rate, as well as on the presence of a SiO2 film on the Si surface. Possible applications of various surface morphologies with metasurface properties are discussed.
Язык оригинала | английский |
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Номер статьи | 012160 |
Число страниц | 3 |
Журнал | Journal of Physics: Conference Series |
Том | 1461 |
Номер выпуска | 1 |
DOI | |
Состояние | Опубликовано - 23 апр 2020 |
Событие | 4th International Conference on Metamaterials and Nanophotonics, METANANO 2019 - St. Petersburg, Российская Федерация Продолжительность: 15 июл 2019 → 19 июл 2019 |