Formation of an ion-cluster beam for material processing

N. G. Korobeishchikov; A. E. Zarvin; V. V. Kalyada; M. D. Khodakov

Formation of an ion-cluster beam for material processing

N. G. Korobeishchikov, A. E. Zarvin, V. V. Kalyada, M. D. Khodakov

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

Аннотация

In this paper the possibility of accelerating gaseous cluster-ion beams for nanomaterials processing are discussed. In order to realize surface processing technology, a high-energy gas cluster ion beam irradiation system was developed. The results of the experimental study of formation of an intense cluster-ion beam of argon and nitrogen are presented. The fundamental phenomenon influences on the main parameters of cluster-ion beam (cluster-ion size, energy, at al.) are considered.

Язык оригинала	английский
Страницы (с-по)	115-123
Число страниц	9
Журнал	Journal of International Scientific Publications
Том	6
Номер выпуска	2
Состояние	Опубликовано - 2012

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https://www.scientific-publications.net/download/materials-methods-and-technologies-2012-2.pdf

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title = "Formation of an ion-cluster beam for material processing",

abstract = "In this paper the possibility of accelerating gaseous cluster-ion beams for nanomaterials processing are discussed. In order to realize surface processing technology, a high-energy gas cluster ion beam irradiation system was developed. The results of the experimental study of formation of an intense cluster-ion beam of argon and nitrogen are presented. The fundamental phenomenon influences on the main parameters of cluster-ion beam (cluster-ion size, energy, at al.) are considered.",

author = "Korobeishchikov, {N. G.} and Zarvin, {A. E.} and Kalyada, {V. V.} and Khodakov, {M. D.}",

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Formation of an ion-cluster beam for material processing. / Korobeishchikov, N. G.; Zarvin, A. E.; Kalyada, V. V.; Khodakov, M. D.

В: Journal of International Scientific Publications, Том 6, № 2, 2012, стр. 115-123.

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

TY - JOUR

T1 - Formation of an ion-cluster beam for material processing

AU - Korobeishchikov, N. G.

AU - Zarvin, A. E.

AU - Kalyada, V. V.

AU - Khodakov, M. D.

PY - 2012

Y1 - 2012

N2 - In this paper the possibility of accelerating gaseous cluster-ion beams for nanomaterials processing are discussed. In order to realize surface processing technology, a high-energy gas cluster ion beam irradiation system was developed. The results of the experimental study of formation of an intense cluster-ion beam of argon and nitrogen are presented. The fundamental phenomenon influences on the main parameters of cluster-ion beam (cluster-ion size, energy, at al.) are considered.

AB - In this paper the possibility of accelerating gaseous cluster-ion beams for nanomaterials processing are discussed. In order to realize surface processing technology, a high-energy gas cluster ion beam irradiation system was developed. The results of the experimental study of formation of an intense cluster-ion beam of argon and nitrogen are presented. The fundamental phenomenon influences on the main parameters of cluster-ion beam (cluster-ion size, energy, at al.) are considered.

M3 - Article

VL - 6

SP - 115

EP - 123

JO - Journal of International Scientific Publications

JF - Journal of International Scientific Publications

SN - 1314-7269

IS - 2

ER -