Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions

N. G. Korobeishchikov; I. V. Nikolaev; M. A. Roenko

doi:10.1134/S1063785019030295

Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions

N. G. Korobeishchikov, I. V. Nikolaev, M. A. Roenko

Отдел прикладной физики ФФ

Результат исследования: Научные публикации в периодических изданиях › статья

2 Цитирования (Scopus)

Аннотация

Abstract: It is demonstrated that a argon cluster ion beam can be used for the finishing treatment of ultrasmooth surfaces (with initial root-mean-square roughness below 0.3 nm) of potassium titanyl phosphate single crystals. Analysis of the power spectral density function of surface roughness showed that cluster-ion irradiation leads to removal of residual chemical contaminations from the subsurface layer and produces additional smoothing of the crystal surface in a broad range of spatial frequencies (ν = 0.2–100 μm ^–1 ).

Язык оригинала	английский
Страницы (с-по)	274-277
Число страниц	4
Журнал	Technical Physics Letters
Том	45
Номер выпуска	3
DOI	https://doi.org/10.1134/S1063785019030295
Состояние	Опубликовано - 1 мар 2019

Доступ к документу

10.1134/S1063785019030295

Link to publication in Scopus

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Цитировать

Korobeishchikov, N. G., Nikolaev, I. V., & Roenko, M. A. (2019). Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions. Technical Physics Letters, 45(3), 274-277. https://doi.org/10.1134/S1063785019030295

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Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions. / Korobeishchikov, N. G.; Nikolaev, I. V.; Roenko, M. A.

В: Technical Physics Letters, Том 45, № 3, 01.03.2019, стр. 274-277.

Результат исследования: Научные публикации в периодических изданиях › статья

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