Fast formation of hybrid periodic surface structures on Hf thin-film by focused femtosecond laser beam

A. V. Dostovalov, K. A. Bronnikov, D. A. Belousov, V. P. Korolkov, S. A. Babin

Результат исследования: Публикации в книгах, отчётах, сборниках, трудах конференцийстатья в сборнике материалов конференциинаучнаярецензирование

Аннотация

We present the results of high-ordered periodic surface structure formation by femtosecond laser pulses (λ = 1026 nm, τ = 232 fs) using an astigmatic Gaussian beam with a diameter of ≈100 μm on the surface of metal films (thickness of 15 nm and 150 nm) of Hf sputtered on the glass substrate. Continuous and uniform structures with a period of ≈700 nm are formed at a scanning speed up to 2000 μm/s on the film with a thickness of 15 nm. In addition, the formation of ablative periodic substructures with a period of about 160 nm oriented perpendicularly to the main ones was observed on the oxide protrusions. In the case of 150 nm thick film, defects, cracks and phase shifts accompanied a uniform structure with a period of ≈940 nm formed at a speed up to 500 μm/s.

Язык оригиналаанглийский
Название основной публикацииAdvanced Laser Processing and Manufacturing III
РедакторыRongshi Xiao, Minghui Hong, Jian Liu, Jianhua Yao, Yuji Sano
ИздательSPIE
Число страниц6
ISBN (электронное издание)9781510630833
DOI
СостояниеОпубликовано - 1 янв 2019
СобытиеAdvanced Laser Processing and Manufacturing III 2019 - Hangzhou, Китай
Продолжительность: 21 окт 201922 окт 2019

Серия публикаций

НазваниеProceedings of SPIE - The International Society for Optical Engineering
Том11183
ISSN (печатное издание)0277-786X
ISSN (электронное издание)1996-756X

Конференция

КонференцияAdvanced Laser Processing and Manufacturing III 2019
СтранаКитай
ГородHangzhou
Период21.10.201922.10.2019

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    Dostovalov, A. V., Bronnikov, K. A., Belousov, D. A., Korolkov, V. P., & Babin, S. A. (2019). Fast formation of hybrid periodic surface structures on Hf thin-film by focused femtosecond laser beam. В R. Xiao, M. Hong, J. Liu, J. Yao, & Y. Sano (Ред.), Advanced Laser Processing and Manufacturing III [111830U] (Proceedings of SPIE - The International Society for Optical Engineering; Том 11183). SPIE. https://doi.org/10.1117/12.2537672