Аннотация
A technique for fabricating self-bearing pseudometallic structures, which hold promise for utilization as quasi-optical frequency-selective elements in the terahertz range of the electromagnetic spectrum, is discussed. The technique is based on microstructuring a continuous dielectric layer via stencilled X-ray lithography involving synchrotron radiation with subsequent metallization of the entire structure surface. The main manufacturing schemes are described, including fabrication of the initial substrates and X-ray masks. Examples of samples of the produced selective elements, such as frequency filters and flat lenses, as well as their operating characteristics, are presented.
Язык оригинала | английский |
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Страницы (с-по) | 710-720 |
Число страниц | 11 |
Журнал | Journal of Surface Investigation |
Том | 11 |
Номер выпуска | 4 |
DOI | |
Состояние | Опубликовано - 1 июл. 2017 |