Fabrication of quasi-optical selective elements for the terahertz range in the form of pseudometallic structures via deep X-ray lithography

A. N. Gentselev, S. A. Kuznetsov, S. G. Baev, B. G. Goldenberg, E. A. Lonshakov

Результат исследования: Научные публикации в периодических изданияхстатья

1 Цитирования (Scopus)

Аннотация

A technique for fabricating self-bearing pseudometallic structures, which hold promise for utilization as quasi-optical frequency-selective elements in the terahertz range of the electromagnetic spectrum, is discussed. The technique is based on microstructuring a continuous dielectric layer via stencilled X-ray lithography involving synchrotron radiation with subsequent metallization of the entire structure surface. The main manufacturing schemes are described, including fabrication of the initial substrates and X-ray masks. Examples of samples of the produced selective elements, such as frequency filters and flat lenses, as well as their operating characteristics, are presented.

Язык оригиналаанглийский
Страницы (с-по)710-720
Число страниц11
ЖурналJournal of Surface Investigation
Том11
Номер выпуска4
DOI
СостояниеОпубликовано - 1 июл 2017

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