Аннотация
The formation of accelerated vapor-phase argon beams has been analyzed experimentally with the aim of developing a laboratory bench for ion-cluster modification of materials. Accelerated argon-cluster beams with energies up to 22 keV and intensities up to 6 × 1013 ions/(cm2 s) have been produced at an average size of cluster ions up to 1013 atoms/cluster. The size distributions of ions in an accelerated ion-cluster beam have been investigated by the retarding-potential method at different stagnation pressures. It is shown that the mass composition of an ion-cluster beam depends on the conditions of ion-beam formation.
Язык оригинала | английский |
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Страницы (с-по) | 25-28 |
Число страниц | 4 |
Журнал | Technical Physics Letters |
Том | 40 |
Номер выпуска | 1 |
DOI | |
Состояние | Опубликовано - янв 2014 |