Electron-Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface

Denis Milakhin; Timur Malin; Vladimir Mansurov; Yury Galitsyn; Konstantin Zhuravlev

doi:10.1002/pssb.201800516

Electron-Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface

Denis Milakhin, Timur Malin, Vladimir Mansurov, Yury Galitsyn, Konstantin Zhuravlev

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

1 Цитирования (Scopus)

Аннотация

The effect of a high-energy electron beam (11 keV) on the (0001) sapphire nitridation process is investigated. The high-energy electrons accelerate more than an order of magnitude the sapphire nitridation process. The effect is due to an increase of the Al and N atom concentrations on the sapphire surface caused by the electron-stimulated desorption of oxygen atoms and electron-stimulated decomposition of ammonia molecules.

Язык оригинала	английский
Номер статьи	1800516
Число страниц	5
Журнал	Physica Status Solidi (B) Basic Research
Том	256
Номер выпуска	6
DOI	https://doi.org/10.1002/pssb.201800516
Состояние	Опубликовано - 1 июн. 2019

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10.1002/pssb.201800516

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abstract = "The effect of a high-energy electron beam (11 keV) on the (0001) sapphire nitridation process is investigated. The high-energy electrons accelerate more than an order of magnitude the sapphire nitridation process. The effect is due to an increase of the Al and N atom concentrations on the sapphire surface caused by the electron-stimulated desorption of oxygen atoms and electron-stimulated decomposition of ammonia molecules.",

keywords = "ammonia-MBE, electron-stimulated processes, III-nitrides, nitridation, reflection high-energy electron diffraction (RHEED), reflection high-energy electron diffraction (RH EED), AL2O3 SURFACE, ADSORPTION, EPITAXY, DESORPTION, GAN, SUBSTRATE, GROWTH, STRUCTURAL-PROPERTIES",

author = "Denis Milakhin and Timur Malin and Vladimir Mansurov and Yury Galitsyn and Konstantin Zhuravlev",

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Electron-Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface. / Milakhin, Denis; Malin, Timur; Mansurov, Vladimir и др.

В: Physica Status Solidi (B) Basic Research, Том 256, № 6, 1800516, 01.06.2019.

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

TY - JOUR

T1 - Electron-Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface

AU - Milakhin, Denis

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AU - Mansurov, Vladimir

AU - Galitsyn, Yury

AU - Zhuravlev, Konstantin

PY - 2019/6/1

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AB - The effect of a high-energy electron beam (11 keV) on the (0001) sapphire nitridation process is investigated. The high-energy electrons accelerate more than an order of magnitude the sapphire nitridation process. The effect is due to an increase of the Al and N atom concentrations on the sapphire surface caused by the electron-stimulated desorption of oxygen atoms and electron-stimulated decomposition of ammonia molecules.

KW - ammonia-MBE

KW - electron-stimulated processes

KW - III-nitrides

KW - nitridation

KW - reflection high-energy electron diffraction (RHEED)

KW - reflection high-energy electron diffraction (RH EED)

KW - AL2O3 SURFACE

KW - ADSORPTION

KW - EPITAXY

KW - DESORPTION

KW - GAN

KW - SUBSTRATE

KW - GROWTH

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