Effect of annealing in oxidizing atmosphere on optical and structural properties of silicon suboxide thin films obtained by gas-jet electron beam plasma chemical vapor deposition method
A. O. Zamchiy, E. A. Baranov, I. E. Merkulova, V. A. Volodin, M. R. Sharafutdinov, S. Ya Khmel
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Подробные сведения о темах исследования «Effect of annealing in oxidizing atmosphere on optical and structural properties of silicon suboxide thin films obtained by gas-jet electron beam plasma chemical vapor deposition method». Вместе они формируют уникальный семантический отпечаток (fingerprint).