Dispersion of the refractive index in high-k dielectrics

V. A. Shvets, V. N. Kruchinin, V. A. Gritsenko

Результат исследования: Научные публикации в периодических изданияхстатьярецензирование

7 Цитирования (Scopus)


A brief review of the optical properties of oxide materials that are used at present as dielectrics in modern microelectronics is presented. Using spectral ellipsometry, dispersion dependencies for different materials are measured. A brief comparative analysis of different dielectric coatings is carried out. The results of our research will be useful in further studies of the properties of dielectrics, as well as in technologies that are employed in the development of new semiconductor instruments and devices.

Язык оригиналаанглийский
Страницы (с-по)728-732
Число страниц5
ЖурналOptics and Spectroscopy (English translation of Optika i Spektroskopiya)
Номер выпуска5
СостояниеОпубликовано - 1 ноя 2017


Подробные сведения о темах исследования «Dispersion of the refractive index in high-k dielectrics». Вместе они формируют уникальный семантический отпечаток (fingerprint).