Control of the conducting surface by terahertz surface electromagnetic waves

A. K. Nikitin; V. V. Gerasimov; B. A. Knyazev; N. T.H. Lien; T. T. Trang

doi:10.1088/1742-6596/1636/1/012036

Control of the conducting surface by terahertz surface electromagnetic waves

A. K. Nikitin, V. V. Gerasimov, B. A. Knyazev, N. T.H. Lien, T. T. Trang

Результат исследования: Научные публикации в периодических изданиях › статья по материалам конференции › рецензирование

Аннотация

The paper considers the possibilities of quality control of the conductive surface and detection of objects on it beyond the horizon, as well as microscopy of flat faces of semiconductor products using surface electromagnetic waves (SEWs) of the terahertz (THz) range. The conditions under which such methods of control can be implemented are determined; schemes of devices that implement such measurements are elaborated; estimates of the possibilities of the developed methods for monitoring metal and semiconductor products probed by monochromatic THz radiation in the form of SEWs are given.

Язык оригинала	английский
Номер статьи	012036
Журнал	Journal of Physics: Conference Series
Том	1636
Номер выпуска	1
DOI	https://doi.org/10.1088/1742-6596/1636/1/012036
Состояние	Опубликовано - 9 окт 2020
Событие	22nd Russian National Conference on Non-Destructive Testing and Technical Diagnostics: Transformation of Non-Destructive Testing and Technical Diagnostics in the Era of Digitalization. Society Security in a Changing World, RNCNDTTD 2020 - Moscow, Российская Федерация Продолжительность: 3 мар 2020 → 5 мар 2020

Доступ к документу

10.1088/1742-6596/1636/1/012036

Link to publication in Scopus

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Цитировать

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abstract = "The paper considers the possibilities of quality control of the conductive surface and detection of objects on it beyond the horizon, as well as microscopy of flat faces of semiconductor products using surface electromagnetic waves (SEWs) of the terahertz (THz) range. The conditions under which such methods of control can be implemented are determined; schemes of devices that implement such measurements are elaborated; estimates of the possibilities of the developed methods for monitoring metal and semiconductor products probed by monochromatic THz radiation in the form of SEWs are given.",

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Control of the conducting surface by terahertz surface electromagnetic waves. / Nikitin, A. K.; Gerasimov, V. V.; Knyazev, B. A.; Lien, N. T.H.; Trang, T. T.

В: Journal of Physics: Conference Series, Том 1636, № 1, 012036, 09.10.2020.

Результат исследования: Научные публикации в периодических изданиях › статья по материалам конференции › рецензирование

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AU - Gerasimov, V. V.

AU - Knyazev, B. A.

AU - Lien, N. T.H.

AU - Trang, T. T.

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