Control of the conducting surface by terahertz surface electromagnetic waves

A. K. Nikitin, V. V. Gerasimov, B. A. Knyazev, N. T.H. Lien, T. T. Trang

Результат исследования: Научные публикации в периодических изданияхстатья по материалам конференциирецензирование

Аннотация

The paper considers the possibilities of quality control of the conductive surface and detection of objects on it beyond the horizon, as well as microscopy of flat faces of semiconductor products using surface electromagnetic waves (SEWs) of the terahertz (THz) range. The conditions under which such methods of control can be implemented are determined; schemes of devices that implement such measurements are elaborated; estimates of the possibilities of the developed methods for monitoring metal and semiconductor products probed by monochromatic THz radiation in the form of SEWs are given.

Язык оригиналаанглийский
Номер статьи012036
ЖурналJournal of Physics: Conference Series
Том1636
Номер выпуска1
DOI
СостояниеОпубликовано - 9 окт 2020
Событие22nd Russian National Conference on Non-Destructive Testing and Technical Diagnostics: Transformation of Non-Destructive Testing and Technical Diagnostics in the Era of Digitalization. Society Security in a Changing World, RNCNDTTD 2020 - Moscow, Российская Федерация
Продолжительность: 3 мар 20205 мар 2020

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