@article{ebd9dbff31c44c139cc4a5b06d582830,
title = "Charge Transport Mechanism and Trap Origin in Methyl-Terminated Organosilicate Glass Low-κ Dielectrics",
abstract = "The charge transport and trap nature responsible for the leakage current through thermally cured methyl-terminated organosilicate low-κ dielectric films are studied. It is found that the Frenkel emission does not describe correctly the charge transport in the studied films. The charge transport occurs via the phonon-assisted electron tunneling between neutral traps as described in the Nasyrov–Gritsenko model. The obtained thermal trap energy value 1.2 eV is close to that for the oxygen divacancy (Si-Si-Si cluster) in SiO2. The electron energy loss spectra, photoluminescence excitation of 2.7 eV blue band spectra, and data from the simulation within the density functional theory for the model SiCOH low-κ structure confirm the presence of oxygen vacancy and divacancy in the studied films. The thermal trap energy value estimated as half the Stokes shift of the blue luminescence also gives a value close to 1.2 eV. It proves the correctness of the Nasyrov–Gritsenko model for describing the charge transport mechanism and the conclusion that oxygen divacancies are traps responsible for the leakage current in the studied low-κ films.",
keywords = "charge transport, density functional theory simulations, low-κ dielectrics, photoluminescence, trap energy, dielectrics, OXYGEN-DEFICIENT CENTERS, DEFECTS, OPTICAL-PROPERTIES, MODEL, DAMAGE, INTERLEVEL, FILMS, LUMINESCENCE, LOW-K DIELECTRICS, CONDUCTION, low-κ",
author = "Perevalov, {Timofey V.} and Gismatulin, {Andrei A.} and Dolbak, {Andrei E.} and Gritsenko, {Vladimir A.} and Trofimova, {Elena S.} and Pustovarov, {Vladimir A.} and Seregin, {Dmitry S.} and Vorotilov, {Konstantin A.} and Baklanov, {Mikhail R.}",
note = "Funding Information: Experiments and simulation were conducted under the grant of the Russian Foundation for Basic Research (RFBR) (project No. 18‐29‐27006). The low‐κ program conceptualization and selection of the material for this research were conducted under the grant RFBR No. 18‐29‐27022. The recipe development and deposition were conducted under the Ministry of Science and Higher Education of Russia (Nos. FSFZ‐2020‐0022, FEUZ‐2020‐0060, 0306‐2019‐0005). The authors are grateful to the Analytical and Technological Research Center “High Technology and Nanostructured Materials” of NSU. The ab initio computations were carried out at the Novosibirsk State University Supercomputer Center. Publisher Copyright: {\textcopyright} 2020 Wiley-VCH GmbH Copyright: Copyright 2020 Elsevier B.V., All rights reserved.",
year = "2020",
month = dec,
day = "11",
doi = "10.1002/pssa.202000654",
language = "English",
journal = "Physica Status Solidi (A) Applications and Materials Science",
issn = "1862-6300",
publisher = "Wiley-VCH Verlag",
}