Characteristics of the Raman spectra of diamond-like carbon films. Influence of methods of synthesis

Alexander Zolkin; Anna Semerikova; Sergey Chepkasov; Maxim Khomyakov

doi:10.1016/j.matpr.2017.09.033

Characteristics of the Raman spectra of diamond-like carbon films. Influence of methods of synthesis

Alexander Zolkin, Anna Semerikova, Sergey Chepkasov, Maxim Khomyakov

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

3 Цитирования (Scopus)

Аннотация

Hydrogenated carbon films were synthesized on single-crystal silicon substrates by an END-Hall ion source or by a linear anode layer source. The gaseous precursors were CH₄ and C₃H₈. The flow rates ranged from 4.5 to 10 sccm. In films synthesized from ion beams, amorphous phase was most pronounced. Carbon films were deposited onto silicon using pulse cathodic arc technique. In these films ordered-structure elements were identified. Raman spectra of a-C and a-C:H films were investigated with the aim of elucidating the interrelation between the hardness of the films (which reached 18, 20, and 45 GPa) and their microstructure.

Язык оригинала	английский
Страницы (с-по)	11480-11485
Число страниц	6
Журнал	Materials Today: Proceedings
Том	4
Номер выпуска	11
DOI	https://doi.org/10.1016/j.matpr.2017.09.033
Состояние	Опубликовано - 1 янв 2017

Доступ к документу

10.1016/j.matpr.2017.09.033

Link to publication in Scopus

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title = "Characteristics of the Raman spectra of diamond-like carbon films. Influence of methods of synthesis",

abstract = "Hydrogenated carbon films were synthesized on single-crystal silicon substrates by an END-Hall ion source or by a linear anode layer source. The gaseous precursors were CH4 and C3H8. The flow rates ranged from 4.5 to 10 sccm. In films synthesized from ion beams, amorphous phase was most pronounced. Carbon films were deposited onto silicon using pulse cathodic arc technique. In these films ordered-structure elements were identified. Raman spectra of a-C and a-C:H films were investigated with the aim of elucidating the interrelation between the hardness of the films (which reached 18, 20, and 45 GPa) and their microstructure.",

keywords = "Diamond-like carbon, End-Hall source, Linear ion source, Pulse cathodic arc, Raman spectroscopy, Transmission electron microscopy, end-Hall source, diamond-like carbon, pulse cathodic arc, transmission electron microscopy, linear ion source",

author = "Alexander Zolkin and Anna Semerikova and Sergey Chepkasov and Maxim Khomyakov",

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Characteristics of the Raman spectra of diamond-like carbon films. Influence of methods of synthesis. / Zolkin, Alexander ; Semerikova, Anna; Chepkasov, Sergey; Khomyakov, Maxim.

В: Materials Today: Proceedings, Том 4, № 11, 01.01.2017, стр. 11480-11485.

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

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