Applications of fs laser radiation for formation of thermochemical lipss on Cr films and fabrication of submicron amplitude gratings

A. V. Dostovalov; V. P. Korolkov; V. S. Terentyev; S. A. Babin

doi:10.1109/PIERS.2017.8262413

Applications of fs laser radiation for formation of thermochemical lipss on Cr films and fabrication of submicron amplitude gratings

A. V. Dostovalov, V. P. Korolkov, V. S. Terentyev, S. A. Babin

Результат исследования: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › рецензирование

Аннотация

The paper presents the results of the formation of thermochemical laser induced periodic surface structure on Cr thin films (40-350 nm) that was sputtered on the glass substrate. The different dependence of TLIPSS formation on processing rate in case of thin (40 nm) and thick (350 nm) is observed.

Язык оригинала	английский
Название основной публикации	2017 Progress in Electromagnetics Research Symposium - Spring, PIERS 2017
Издатель	Electromagnetics Academy
Страницы	3768-3770
Число страниц	3
Том	Part F134321
ISBN (электронное издание)	9781509062690
DOI	https://doi.org/10.1109/PIERS.2017.8262413
Состояние	Опубликовано - 16 янв 2018
Событие	2017 Progress In Electromagnetics Research Symposium - Spring, PIERS 2017 - St. Petersburg, Российская Федерация Продолжительность: 22 мая 2017 → 25 мая 2017

Серия публикаций

Название	Progress in Electromagnetics Research Symposium
ISSN (печатное издание)	1559-9450
ISSN (электронное издание)	1931-7360

Конференция

Конференция	2017 Progress In Electromagnetics Research Symposium - Spring, PIERS 2017
Страна	Российская Федерация
Город	St. Petersburg
Период	22.05.2017 → 25.05.2017

Доступ к документу

10.1109/PIERS.2017.8262413

Link to publication in Scopus

Fingerprint Подробные сведения о темах исследования «Applications of fs laser radiation for formation of thermochemical lipss on Cr films and fabrication of submicron amplitude gratings». Вместе они формируют уникальный семантический отпечаток (fingerprint).

Цитировать

Dostovalov, A. V., Korolkov, V. P., Terentyev, V. S., & Babin, S. A. (2018). Applications of fs laser radiation for formation of thermochemical lipss on Cr films and fabrication of submicron amplitude gratings. В 2017 Progress in Electromagnetics Research Symposium - Spring, PIERS 2017 (Том Part F134321, стр. 3768-3770). (Progress in Electromagnetics Research Symposium). Electromagnetics Academy. https://doi.org/10.1109/PIERS.2017.8262413

Dostovalov, A. V. ; Korolkov, V. P. ; Terentyev, V. S. ; Babin, S. A. / Applications of fs laser radiation for formation of thermochemical lipss on Cr films and fabrication of submicron amplitude gratings. 2017 Progress in Electromagnetics Research Symposium - Spring, PIERS 2017. Том Part F134321 Electromagnetics Academy, 2018. стр. 3768-3770 (Progress in Electromagnetics Research Symposium).

@inproceedings{3b5aef5202394f4d8c1b49845208bfd9,

title = "Applications of fs laser radiation for formation of thermochemical lipss on Cr films and fabrication of submicron amplitude gratings",

abstract = "The paper presents the results of the formation of thermochemical laser induced periodic surface structure on Cr thin films (40-350 nm) that was sputtered on the glass substrate. The different dependence of TLIPSS formation on processing rate in case of thin (40 nm) and thick (350 nm) is observed.",

author = "Dostovalov, {A. V.} and Korolkov, {V. P.} and Terentyev, {V. S.} and Babin, {S. A.}",

year = "2018",

month = jan,

day = "16",

doi = "10.1109/PIERS.2017.8262413",

language = "English",

volume = "Part F134321",

series = "Progress in Electromagnetics Research Symposium",

publisher = "Electromagnetics Academy",

pages = "3768--3770",

booktitle = "2017 Progress in Electromagnetics Research Symposium - Spring, PIERS 2017",

address = "United States",

note = "2017 Progress In Electromagnetics Research Symposium - Spring, PIERS 2017 ; Conference date: 22-05-2017 Through 25-05-2017",

}

Dostovalov, AV, Korolkov, VP, Terentyev, VS & Babin, SA 2018, Applications of fs laser radiation for formation of thermochemical lipss on Cr films and fabrication of submicron amplitude gratings. в 2017 Progress in Electromagnetics Research Symposium - Spring, PIERS 2017. том. Part F134321, Progress in Electromagnetics Research Symposium, Electromagnetics Academy, стр. 3768-3770, 2017 Progress In Electromagnetics Research Symposium - Spring, PIERS 2017, St. Petersburg, Российская Федерация, 22.05.2017. https://doi.org/10.1109/PIERS.2017.8262413

Applications of fs laser radiation for formation of thermochemical lipss on Cr films and fabrication of submicron amplitude gratings. / Dostovalov, A. V.; Korolkov, V. P.; Terentyev, V. S.; Babin, S. A.

2017 Progress in Electromagnetics Research Symposium - Spring, PIERS 2017. Том Part F134321 Electromagnetics Academy, 2018. стр. 3768-3770 (Progress in Electromagnetics Research Symposium).

Результат исследования: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › рецензирование

TY - GEN

T1 - Applications of fs laser radiation for formation of thermochemical lipss on Cr films and fabrication of submicron amplitude gratings

AU - Dostovalov, A. V.

AU - Korolkov, V. P.

AU - Terentyev, V. S.

AU - Babin, S. A.

PY - 2018/1/16

Y1 - 2018/1/16

N2 - The paper presents the results of the formation of thermochemical laser induced periodic surface structure on Cr thin films (40-350 nm) that was sputtered on the glass substrate. The different dependence of TLIPSS formation on processing rate in case of thin (40 nm) and thick (350 nm) is observed.

AB - The paper presents the results of the formation of thermochemical laser induced periodic surface structure on Cr thin films (40-350 nm) that was sputtered on the glass substrate. The different dependence of TLIPSS formation on processing rate in case of thin (40 nm) and thick (350 nm) is observed.

UR - http://www.scopus.com/inward/record.url?scp=85044957840&partnerID=8YFLogxK

U2 - 10.1109/PIERS.2017.8262413

DO - 10.1109/PIERS.2017.8262413

M3 - Conference contribution

AN - SCOPUS:85044957840

VL - Part F134321

T3 - Progress in Electromagnetics Research Symposium

SP - 3768

EP - 3770

BT - 2017 Progress in Electromagnetics Research Symposium - Spring, PIERS 2017

PB - Electromagnetics Academy

T2 - 2017 Progress In Electromagnetics Research Symposium - Spring, PIERS 2017

Y2 - 22 May 2017 through 25 May 2017

ER -

Dostovalov AV, Korolkov VP, Terentyev VS, Babin SA. Applications of fs laser radiation for formation of thermochemical lipss on Cr films and fabrication of submicron amplitude gratings. В 2017 Progress in Electromagnetics Research Symposium - Spring, PIERS 2017. Том Part F134321. Electromagnetics Academy. 2018. стр. 3768-3770. (Progress in Electromagnetics Research Symposium). https://doi.org/10.1109/PIERS.2017.8262413