@inproceedings{3b5aef5202394f4d8c1b49845208bfd9,
title = "Applications of fs laser radiation for formation of thermochemical lipss on Cr films and fabrication of submicron amplitude gratings",
abstract = "The paper presents the results of the formation of thermochemical laser induced periodic surface structure on Cr thin films (40-350 nm) that was sputtered on the glass substrate. The different dependence of TLIPSS formation on processing rate in case of thin (40 nm) and thick (350 nm) is observed.",
author = "Dostovalov, {A. V.} and Korolkov, {V. P.} and Terentyev, {V. S.} and Babin, {S. A.}",
year = "2018",
month = jan,
day = "16",
doi = "10.1109/PIERS.2017.8262413",
language = "English",
volume = "Part F134321",
series = "Progress in Electromagnetics Research Symposium",
publisher = "Electromagnetics Academy",
pages = "3768--3770",
booktitle = "2017 Progress in Electromagnetics Research Symposium - Spring, PIERS 2017",
address = "United States",
note = "2017 Progress In Electromagnetics Research Symposium - Spring, PIERS 2017 ; Conference date: 22-05-2017 Through 25-05-2017",
}