Application of Vernier Principle to Photoelectric Autocollimator for Improvement of Accuracy, Angular Range and Speed

Andrey V. Golitsyn, Alexandr A. Golitsyn, Alexander K. Dmitriev, Natalia A. Seyfi

Результат исследования: Публикации в книгах, отчётах, сборниках, трудах конференцийстатья в сборнике материалов конференциинаучнаярецензирование

Аннотация

An improvement of photoelectric autocollimator is proposed. Periodical structures of light source grating and photodetector array form an additional combination signal of Vernier type. The solution promises to exceed the limits of accuracy, angular range and speed imposed by finite number of photodetector elements. Calculation of a lens for trial version of the device with specified characteristics necessary to ensure measurement accuracy shows attainability of F-Theta distortion within 10-6%-tenths of nanometres, without taking manufacturing tolerances into consideration. It is significantly less than value of light spot within diffraction limit (3 microns) and typical pixel pitch of the linear or matrix sensor. The transverse aberrations also seem hard attainable lower than the diffraction limit. The processing speed of designed trial version of autocollimator is about 30 measurements per second and if needed it can be increased in case of using digital camera with higher frame rate in the device construction.

Язык оригиналаанглийский
Название основной публикацииProceedings of the 2021 15th International Scientific-Technical Conference on Actual Problems of Electronic Instrument Engineering, APEIE 2021
ИздательInstitute of Electrical and Electronics Engineers Inc.
Страницы674-677
Число страниц4
ISBN (электронное издание)978-1-6654-3408-9
DOI
СостояниеОпубликовано - 2021
Событие15th International Scientific-Technical Conference on Actual Problems of Electronic Instrument Engineering, APEIE 2021 - Novosibirsk, Российская Федерация
Продолжительность: 19 ноя 202121 ноя 2021

Серия публикаций

НазваниеProceedings of the 2021 15th International Scientific-Technical Conference on Actual Problems of Electronic Instrument Engineering, APEIE 2021

Конференция

Конференция15th International Scientific-Technical Conference on Actual Problems of Electronic Instrument Engineering, APEIE 2021
СтранаРоссийская Федерация
ГородNovosibirsk
Период19.11.202121.11.2021

Предметные области OECD FOS+WOS

  • 1.03 ФИЗИЧЕСКИЕ НАУКИ И АСТРОНОМИЯ
  • 2.02.IQ ИНЖЕНЕРИЯ, ЭЛЕКТРИЧЕСКАЯ И ЭЛЕКТРОННАЯ

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