Precise Measurement of the Optical Characteristics of the Subsurface Layer of Solids

L. A. Fedyukhin; A. V. Gorchakov; N. G. Korobeishchikov; I. V. Nikolaev

doi:10.1134/S0021364021170069

Precise Measurement of the Optical Characteristics of the Subsurface Layer of Solids

Переведенное название: Прецизионное измерение оптических характеристик приповерхностного слоя твердых тел

L. A. Fedyukhin, A. V. Gorchakov, N. G. Korobeishchikov, I. V. Nikolaev

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

Аннотация

Предложен метод измерения и алгоритм расчета показателя преломления оптических материалов, основанный на модели трехслойной структуры. Проведена экспериментальная апробация метода с использованием оптических мер. Численно показана единственность восстановления показателей преломления подложки, приповерхностного слоя, а также толщины слоя по измерению коэффициента отражения зондирующего излучения в области угла Брюстера и угла нормального падения. Впервые измерены показатель преломления приповерхностного слоя с абсолютной погрешностью измерения ±10 и толщина приповерхностного слоя с доверительной погрешностью ±1 нм.

Переведенное название	Прецизионное измерение оптических характеристик приповерхностного слоя твердых тел
Язык оригинала	английский
Номер статьи	3
Страницы (с-по)	256-262
Число страниц	7
Журнал	JETP Letters
Том	114
Номер выпуска	5
DOI	https://doi.org/10.1134/S0021364021170069
Состояние	Опубликовано - сен 2021

Предметные области OECD FOS+WOS

1.03 ФИЗИЧЕСКИЕ НАУКИ И АСТРОНОМИЯ

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title = "Precise Measurement of the Optical Characteristics of the Subsurface Layer of Solids",

abstract = "A measurement method and a calculation algorithm based on the three-layer structure model have been proposed for the refractive index of optical materials. The method has been experimentally tested with refractive index standards. The uniqueness of the reconstruction of the refractive indices of the substrate and subsurface layer, as well as the thickness of the layer, from the measured reflection coefficient of probe radiation near the Brewster angle and the angle of normal incidence has been demonstrated numerically. The measurements of the refractive index of the subsurface layer with an absolute error of 10–4 and the thickness of the subsurface layer with a confidence error of 1 nm have been performed for the first time.",

author = "Fedyukhin, {L. A.} and Gorchakov, {A. V.} and Korobeishchikov, {N. G.} and Nikolaev, {I. V.}",

note = "Funding Information: This work was supported by the Russian Foundation for Basic Research and Novosibirsk region (project no. 20-42-540004, measurements) and by the Russian Science Foundation (project no. 21-19-00046, preparation of the samples). Publisher Copyright: {\textcopyright} 2021, Pleiades Publishing, Inc.",

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Precise Measurement of the Optical Characteristics of the Subsurface Layer of Solids. / Fedyukhin, L. A.; Gorchakov, A. V.; Korobeishchikov, N. G.; Nikolaev, I. V.

В: JETP Letters, Том 114, № 5, 3, 09.2021, стр. 256-262.

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

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