Overview of Integrated Optical Sensors Based on Silicon: Forecasts and Results of the Decade

A. V. Tsarev

doi:10.3103/S8756699020040123

Overview of Integrated Optical Sensors Based on Silicon: Forecasts and Results of the Decade

Переведенное название: Обзор интегрально-оптических сенсоров на кремнии - прогнозы и итоги десятилетия [приглашённая статья]

A. V. Tsarev

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

1 Цитирования (Scopus)

Аннотация

Кремниевая фотоника является важнейшей технологической платформой для создания множества функциональных оптических элементов, включая перспективные типы оптических сенсоров. Причём в последние годы 20 % всех публикаций по кремниевой фотонике посвящено именно разработке различных вариантов оптических сенсоров. Их достоинство заключается в совмещении высоких технических параметров с возможностью массового изготовления по КМОП-технологии микроэлектроники и нанофотоники. Даётся краткое описание различных технологических решений последнего десятилетия, обеспечивающих поступательный прогресс в развитии характеристик оптических сенсоров. Отдельное внимание уделено новым перспективным конструкциям сенсоров на основе бимодовой (bimodal) технологии, обещающей значительное увеличение сенсорной чувствительности за счёт выравнивания групповой задержки пары разных оптических мод, распространяющихся по волноводной структуре. Обзор будет полезен для отечественных и зарубежных исследователей, работающих по сенсорной тематике.

Переведенное название	Обзор интегрально-оптических сенсоров на кремнии - прогнозы и итоги десятилетия [приглашённая статья]
Язык оригинала	английский
Номер статьи	13
Страницы (с-по)	412-430
Число страниц	19
Журнал	Optoelectronics, Instrumentation and Data Processing
Том	56
Номер выпуска	4
DOI	https://doi.org/10.3103/S8756699020040123
Состояние	Опубликовано - июл 2020

Предметные области OECD FOS+WOS

1.03 ФИЗИЧЕСКИЕ НАУКИ И АСТРОНОМИЯ

ГРНТИ

29.31 Оптика

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title = "Overview of Integrated Optical Sensors Based on Silicon: Forecasts and Results of the Decade",

abstract = "Silicon photonics is the most important technological platform for creating a variety of functional optical elements, including promising types of optical sensors. Moreover, in recent years, 20% of all publications on silicon photonics are devoted to the development of various versions of optical sensors. Their advantage steams from the combination of high technical parameters with the possibility of mass production using CMOS technology of microelectronics and nanophotonics. A brief description of various technological solutions of the last decade that provide progress in the development of optical sensor characteristics is given. Special attention is paid to new promising sensor designs based on bimodal technology, which promises a significant increase in sensor sensitivity by means of equalizing the group delay of a pair of different optical modes propagating through the waveguide structure. The review will be useful for domestic and foreign researchers working in the field of sensor development.",

keywords = "channel waveguide, grating coupling element, optical resonator, optical sensor, photonic crystal, silicon-on-insulator, slot waveguide, subwavelength grating, Vernier effect",

author = "Tsarev, {A. V.}",

note = "Funding Information: This work was supported by the Russian Foundation for Basic Research (project no. 19-17-50061). Publisher Copyright: {\textcopyright} 2020, Allerton Press, Inc. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.",

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Overview of Integrated Optical Sensors Based on Silicon: Forecasts and Results of the Decade. / Tsarev, A. V.

В: Optoelectronics, Instrumentation and Data Processing, Том 56, № 4, 13, 07.2020, стр. 412-430.

Результат исследования: Научные публикации в периодических изданиях › статья › рецензирование

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