Volatile asymmetric fluorinated (O^N)-chelated palladium complexes: From ligand sources to MOCVD application

N. S. Nikolaeva, N. V. Kuratieva, E. S. Vikulova, P. A. Stabnikov, N. B. Morozova

Research output: Contribution to journalArticlepeer-review


The work deals with the volatile asymmetric palladium complexes of β-ketoiminate-type as a new direction to design the effective partially fluorinated (O^N)-chelated precursors for metal–organic chemical vapor deposition (MOCVD). To determine the effect of the substituent on the donor nitrogen atom, [Pd(CF3COCHCN(R)CH3)2]2 complexes with R = CH3 (Mei-tfac) and N(CH3)2 (dmht) were synthesized and characterized by elemental analysis, IR and NMR spectroscopy. The molecular and crystal structures of the complexes as well as the initial ligand sources HMei-tfac and Hdmht were determined by single-crystal XRD. The obtained a new crystallographic and thermal (TG/DTA) information combined with the crystal lattice energy calculations allowed to reveal the features of the N-substituted fluorinated complexes in comparison with their non-fluorinated analogs. The possibility of using the proposed compounds as MOCVD precursors was experimentally confirmed.

Original languageEnglish
Pages (from-to)455-463
Number of pages9
Publication statusPublished - 1 Oct 2019


  • Beta-ketoiminates
  • Palladium volatile precursors
  • Single crystal X-ray diffraction analysis
  • Thermal properties


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