Ultra-smooth surface polishing by argon cluster ion beam: Proc. of the Russia-Japan Conference “Advanced Materials – 2016: Synthesis, Processing and Properties of Nanostructures”. Oct. 30th – Nov. 3rd, 2016 / Novosibirsk State University. – Novosibirsk. 2016 – p. 104. ISBN 978-5-4437-0570-5.

Николай Геннадьевич Коробейщиков; Иван Владимирович Николаев; Максим Анатольевич Роенко; Валерий Владимирович Каляда

Ultra-smooth surface polishing by argon cluster ion beam: Proc. of the Russia-Japan Conference “Advanced Materials – 2016: Synthesis, Processing and Properties of Nanostructures”. Oct. 30th – Nov. 3rd, 2016 / Novosibirsk State University. – Novosibirsk. 2016 – p. 104. ISBN 978-5-4437-0570-5.

Николай Геннадьевич Коробейщиков, Иван Владимирович Николаев, Максим Анатольевич Роенко, Валерий Владимирович Каляда

Research output: Contribution to conference › Paper › peer-review

Original language	English
Pages	104
Number of pages	1
Publication status	Published - 2016

Cite this

Коробейщиков, Н. Г., Николаев, И. В., Роенко, М. А., & Каляда, В. В. (2016). Ultra-smooth surface polishing by argon cluster ion beam: Proc. of the Russia-Japan Conference “Advanced Materials – 2016: Synthesis, Processing and Properties of Nanostructures”. Oct. 30th – Nov. 3rd, 2016 / Novosibirsk State University. – Novosibirsk. 2016 – p. 104. ISBN 978-5-4437-0570-5. . 104.

Коробейщиков, Николай Геннадьевич ; Николаев, Иван Владимирович ; Роенко, Максим Анатольевич ; Каляда, Валерий Владимирович. / Ultra-smooth surface polishing by argon cluster ion beam : Proc. of the Russia-Japan Conference “Advanced Materials – 2016: Synthesis, Processing and Properties of Nanostructures”. Oct. 30th – Nov. 3rd, 2016 / Novosibirsk State University. – Novosibirsk. 2016 – p. 104. ISBN 978-5-4437-0570-5. . 1 p.

@conference{ddc5b3c70c074e669df1e276bd850b73,

title = "Ultra-smooth surface polishing by argon cluster ion beam: Proc. of the Russia-Japan Conference “Advanced Materials – 2016: Synthesis, Processing and Properties of Nanostructures”. Oct. 30th – Nov. 3rd, 2016 / Novosibirsk State University. – Novosibirsk. 2016 – p. 104. ISBN 978-5-4437-0570-5. ",

author = "Коробейщиков, {Николай Геннадьевич} and Николаев, {Иван Владимирович} and Роенко, {Максим Анатольевич} and Каляда, {Валерий Владимирович}",

year = "2016",

language = "English",

pages = "104",

}

Коробейщиков, НГ , Николаев, ИВ , Роенко, МА & Каляда, ВВ 2016, 'Ultra-smooth surface polishing by argon cluster ion beam: Proc. of the Russia-Japan Conference “Advanced Materials – 2016: Synthesis, Processing and Properties of Nanostructures”. Oct. 30th – Nov. 3rd, 2016 / Novosibirsk State University. – Novosibirsk. 2016 – p. 104. ISBN 978-5-4437-0570-5. ', pp. 104.

Ultra-smooth surface polishing by argon cluster ion beam : Proc. of the Russia-Japan Conference “Advanced Materials – 2016: Synthesis, Processing and Properties of Nanostructures”. Oct. 30th – Nov. 3rd, 2016 / Novosibirsk State University. – Novosibirsk. 2016 – p. 104. ISBN 978-5-4437-0570-5. . / Коробейщиков, Николай Геннадьевич ; Николаев, Иван Владимирович ; Роенко, Максим Анатольевич ; Каляда, Валерий Владимирович.

2016. 104.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Ultra-smooth surface polishing by argon cluster ion beam

T2 - Proc. of the Russia-Japan Conference “Advanced Materials – 2016: Synthesis, Processing and Properties of Nanostructures”. Oct. 30th – Nov. 3rd, 2016 / Novosibirsk State University. – Novosibirsk. 2016 – p. 104. ISBN 978-5-4437-0570-5.

AU - Коробейщиков, Николай Геннадьевич

AU - Николаев, Иван Владимирович

AU - Роенко, Максим Анатольевич

AU - Каляда, Валерий Владимирович

PY - 2016

Y1 - 2016

M3 - Paper

SP - 104

ER -

Коробейщиков НГ , Николаев ИВ , Роенко МА , Каляда ВВ. Ultra-smooth surface polishing by argon cluster ion beam: Proc. of the Russia-Japan Conference “Advanced Materials – 2016: Synthesis, Processing and Properties of Nanostructures”. Oct. 30th – Nov. 3rd, 2016 / Novosibirsk State University. – Novosibirsk. 2016 – p. 104. ISBN 978-5-4437-0570-5. . 2016.