Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography

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Abstract

It is brought an approach of creation and close-packing two-dimensional photonic crystals with given sizes of elements by the EBL. The main problems of formation these structures were considered.

Original languageEnglish
Title of host publication2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 - Proceedings
Pages47-50
Number of pages4
DOIs
Publication statusPublished - 2012
Event2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012 - Erlagol, Altai, Russian Federation
Duration: 2 Jul 20126 Jul 2012

Publication series

NameInternational Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings
ISSN (Print)1815-3712

Conference

Conference2012 13th Annual International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM'2012
CountryRussian Federation
CityErlagol, Altai
Period02.07.201206.07.2012

Keywords

  • lithography
  • Photonic crystal
  • proximity effect

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