The effect of the substrate spatial orientation on the properties of amorphous carbon coatings deposited from pulse plasma flows

Sergey Chepkasov, Maksim Khomyakov, Alexander Zolkin, Evgeniy Maksimovskii, Dmitry Piliptsou

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Abstract

Tetrahedral amorphous carbon coatings (ta-C) have been deposited by pulsed vacuum arc method at different incidence angles of the carbon ions flow on the silicon substrate, determined from the axis of the flow direction and from normal to the substrate surface, and corresponded to 0°, 15°, 45° and 75°. The effect of the substrate orientation relative to the propagation direction of the pulsed carbon plasma flow on the structure, morphology, mechanical and optical properties of ta-C coatings has been studied. The study indicated a decrease in the number of nano - and macroparticles with an increase in the incidence angle of the flow. Also, a change in sp2 cluster size and their ordering with an increase in the incidence angle of the flow was found. The substrate tilting led to a decrease in the thickness, refractive index, nanohardness and Young's modulus of ta-C coatings. The optimal position of the substrate relative to the incident flow was found to be 15°. This angle corresponds to maximum values of hardness (28 GPa) and Young's modulus (227 GPa) of the coating.

Original languageEnglish
Title of host publicationProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages856-862
Number of pages7
ISBN (Electronic)9781728126869
DOIs
Publication statusPublished - 14 Sep 2020
Event7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 - Virtual, Tomsk, Russian Federation
Duration: 14 Sep 202026 Sep 2020

Publication series

NameProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Conference

Conference7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
CountryRussian Federation
CityVirtual, Tomsk
Period14.09.202026.09.2020

Keywords

  • AFM
  • Ellipsometry
  • Incidence angle
  • Nanoindentation
  • Pulsed vacuum arc
  • Raman spectroscopy
  • SEM
  • Tetrahedral amorphous carbon coatings

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